Symposium C – Ion Beam Processing of Advanced Electronic Materials
Research Article
Broad and Focused Ion Beam Ga+ Implantation Damage in the Fabrication of p+-n Si Shallow Junctions
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- 21 February 2011, 161
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Damage Growth in Si During Self-Ion Irradiation: a Study of Ion Effects Over an Extended Energy Range
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- 21 February 2011, 169
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Epitaxial Explosive Crystallization of Amorphous Silicon Layers Buried in a Silicon (100) and (111) Matrix
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- 21 February 2011, 179
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MeV Implantation of Gallium Arsenide
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- 21 February 2011, 185
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Influence of the Temperature of Implantation on the Morphology of Defects in MeV Implanted GaAs.
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- 21 February 2011, 191
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Defects Produced by High Energy Oxygen Ions Implanted in Silicon
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- 21 February 2011, 197
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Partially Ionized Beam Deposition of Thin Films
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- 21 February 2011, 207
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Fabrication of High Quality Silicide Layers by Ion Implantation
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- 21 February 2011, 217
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Lateral Confinement of Silicide Layers Synthesized with High Dose Implantation and Annealing
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- 21 February 2011, 223
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Formation of Buried Iridium Silicide Layer in Silicon by High Dose Iridium Ion Implantation
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- 21 February 2011, 229
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Back Channel Degradation and Device Material Improvement by Ge Implantation
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- 21 February 2011, 235
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On the Formation of Thick and Multiple Layer Simox Structures and their Applications
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- 21 February 2011, 241
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Oxygen Doped Silicon Surface Layers by Ion Implantation
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- 21 February 2011, 247
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Study of Stress and Morphology of Silicon–On–Insulator by Means of Ultraviolet Reflectance Spectroscopy
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- 21 February 2011, 253
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Ion Implantation Processing of Gaas and Related Compounds
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- 21 February 2011, 261
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Compensation :in GaAs/GaAlAs Heterostructures by Ion Implantation Comparison of Oxygen and Boron
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- 21 February 2011, 273
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Correlation Between Defect Characteristics and Layer Intermixing in Si Implanted GaAs/AIGaAs Superlattices
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- 21 February 2011, 279
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Implant Damage in AlGaAs Based Superlattices and Alloys at 77K
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- 21 February 2011, 285
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Enhanced Interdiffusion of GaAs-AlgaAs Interfaces Following Ion Implantation and Rapid Thermal Annealing
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- 21 February 2011, 291
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Ion Beam Mixing of GaAs/AlGaAs Superlattice and ITS Relationship to Amorphization
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- 21 February 2011, 297
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