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Towards sub-100-nm X-ray microscopy for tomographic applications

Published online by Cambridge University Press:  29 February 2012

P. Bruyndonckx ,
A. Sasov  and
B. Pauwels
P. Bruyndonckx*
Affiliation:
Skyscan, Kartuizersweg 3B, 2550 Kontich, Belgium
A. Sasov
Affiliation:
Skyscan, Kartuizersweg 3B, 2550 Kontich, Belgium
B. Pauwels
Affiliation:
Skyscan, Kartuizersweg 3B, 2550 Kontich, Belgium
*
a)Author to whom correspondence should be addressed. Electronic mail: [email protected]
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Abstract

We have demonstrated that structures down to 150 nm can be visualized in X-ray projection images using nanofocus X-ray sources. Due to their unlimited depth of focus, they do not possess a limit on the specimen size. This is essential for three-dimensional tomographic imaging of samples with a diameter larger than a few microns. Further simulation studies have shown that optimization of the detector response curve and switching from a reflective X-ray target to a transmission target should allow us to reach sub-100-nm resolutions.

Keywords

nanotomographynanofocal spot sizeX-ray microscopy
Type
Technical Articles
Information
Powder Diffraction , Volume 25 , Issue 2 , June 2010 , pp. 157 - 160
Copyright
Copyright © Cambridge University Press 2010

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