Symposium DD – Microelectromechanical Systems–Materials and Devices
Research Article
Optimization of the Geometry of the MEMS Electrothermal Actuator to Maximize In-Plane Tip Deflection
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- 01 February 2011, 1052-DD03-12
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Influence of Materials on the Performance Limits of Microactuators
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- 01 February 2011, 1052-DD07-03
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Relationship between film stress and dislocation microstructure evolution in thin films
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- 01 February 2011, 1052-DD07-06
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Compressive magnetostriction of FeSm alloy film
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- 01 February 2011, 1052-DD06-32
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Comparison of 1D and 2D Theories of Thermoelastic Damping in Flexural Microresonators
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- 01 February 2011, 1052-DD06-22
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Passive devices for determining fracture strength of MEMS structural materials
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- 01 February 2011, 1052-DD02-02
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Mechanical Stress Sensors for Copper Damascene Interconnects
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- 01 February 2011, 1052-DD03-01
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The Effect of Hydrophobic Patterning on Micromolding of Aqueous-Derived Silk Structures
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- 01 February 2011, 1052-DD03-32
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Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes
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- 01 February 2011, 1052-DD08-02
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Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion Implantation
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- 01 February 2011, 1052-DD03-10
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Analysis and Measurement of Forces in an Electrowetting-Driven Oscillator
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- 01 February 2011, 1052-DD08-01
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Excimer Laser Induced Patterning of PSZT and PLZT Flms
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- 01 February 2011, 1052-DD06-03
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A Review of Tension Test Methods for Thin Films
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- 01 February 2011, 1052-DD01-01
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MEMS Lubrication: An Atomistic Perspective of a Bound + Mobile Lubricant
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- 01 February 2011, 1052-DD01-09
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Micro-Topography Enhances Directional Myogenic Differentiation of Skeletal Precursor Cells
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- 01 February 2011, 1052-DD03-27
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Nature-Inspired Microfluidic Manipulation Using Magnetic Actuators
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- 01 February 2011, 1052-DD08-06
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Fast Characterization of Silicon Membrane Structures by Laser-Doppler Vibrometry
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- 01 February 2011, 1052-DD01-06
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Fabrication of C54-TiSi2 Thin Films Using Cathodic Arc Deposition and Rapid Thermal Annealing
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- 01 February 2011, 1052-DD06-29
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Reliability of MEMS Materials: Mechanical Characterization of Thin-Films using the Wafer Scale Bulge Test and Improved Microtensile Techniques
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- 01 February 2011, 1052-DD01-02
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Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline Silicon
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- 01 February 2011, 1052-DD02-03
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