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Fast Characterization of Silicon Membrane Structures by Laser-Doppler Vibrometry

Published online by Cambridge University Press:  01 February 2011

Ronny Gerbach ,
Matthias Ebert  and
Joerg Bagdahn
Ronny Gerbach
Affiliation:
[email protected], Fraunhofer Institute for Mechanics of Materials, Components in Microelectronics, Microsystems and Photovoltaics, Walter-Huelse-Str. 1, Halle, 06120, Germany
Matthias Ebert
Affiliation:
[email protected], Fraunhofer Institute for Mechanics of Materials, Components in Microelectronics, Microsystems and Photovoltaics, Walter-Huelse-Str. 1, Halle, 06120, Germany
Joerg Bagdahn
Affiliation:
[email protected], Fraunhofer Institute for Mechanics of Materials, Components in Microelectronics, Microsystems and Photovoltaics, Walter-Huelse-Str. 1, Halle, 06120, Germany
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Abstract

Micromechanical structures were investigated nondestructively via laser-Doppler-vibrometry to determine defect structures. Therefore, silicon membrane structures were characterized by their measured resonant frequencies and mode shapes. The influence of defects on the micromechanical structures is shown on the measured dynamic properties. Defect samples were indentified on the basis of the ratios of measured resonant frequencies and the quantified comparison of mode shapes without an identification of unknown parameters. The investigations showed that a fast determination of defect structures is possible by measured dynamic properties.

Keywords

microelectro-mechanical (MEMS)opticalkinetics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD01-06
Copyright
Copyright © Materials Research Society 2008

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References

1 Bossoboeuf, A. and Petitgrand, S., J. Micromech. Microeng 13, S23 (2003)Google Scholar
2 Gorecki, C., Jozwik, M. and Salbut, L., Proc. SPIE 5543, 63 (2004)Google Scholar
3 Rembe, C., Siegmund, G., Steger, H. and Woertge, M., in Optical Inspection of MEMS, edited by Osten, W. (Taylor & Francis Group, New York, 2007), p. 245 Google Scholar
4 Ebert, M., Gerbach, R., Bagdahn, J., Michael, S. and Hering, S., Proc. 7th EuroSimE, Como, 208 (2006)Google Scholar
5 Kurth, and Doetzel, W., Sensors and Actuators A 62, 760 (1997)Google Scholar
6 Zhang, L. M., Uttamchandani, D., Culshaw, B. and Dobson, P., Meas. Sci. Technol. 1, 1343(1990)Google Scholar
7 Gerbach, R., Naumann, F., Ebert, M. and Bagdahn, J., Proc. of MikroSystemTechnik Kongress 2007, 877 (2007)Google Scholar