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Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes

Published online by Cambridge University Press:  01 February 2011

Albert Romano-Rodriguez ,
Francisco Hernandez-Ramirez ,
Joan Daniel Prades ,
Albert Tarancon ,
Olga Casals ,
Roman Jimenez-Diaz ,
Miguel Angel Juli ,
Juan Ramon Morante ,
Sven Barth  and
Sanjay Mathur
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Albert Romano-Rodriguez
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain, +34 93 403 91 56, +34 93 402 11 48
Francisco Hernandez-Ramirez
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Joan Daniel Prades
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Albert Tarancon
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Olga Casals
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Roman Jimenez-Diaz
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Miguel Angel Juli
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Juan Ramon Morante
Affiliation:
[email protected], University of Barcelona, Electronics, Martí i Franquès 1, Barcelona, E-08028, Spain
Sven Barth
Affiliation:
[email protected], University Würzburg, Chemistry, Würzburg, D-97070, Germany
Sanjay Mathur
Affiliation:
[email protected], University Würzburg, Chemistry, Würzburg, D-97070, Germany
Andreas Helwig
Affiliation:
[email protected], EADS Deutschland GmbH, IW-SI Sensors, Electronics & System Integration, Muenchen, D-81663, Germany
Jan Spannhake
Affiliation:
[email protected], EADS Deutschland GmbH, IW-SI Sensors, Electronics & System Integration, Muenchen, D-81663, Germany
Gerhard Mueller
Affiliation:
[email protected], EADS Deutschland GmbH, IW-SI Sensors, Electronics & System Integration, Muenchen, D-81663, Germany
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Abstract

Bottom – up techniques were used to obtain gas sensors based on individual SnO2 nanowires placed over microhotplates with integrated heaters. These nanowires were electrically contacted to pre-patterned microelectrodes by means of Focused Ion Beam (FIB) nanofabrication methodologies. The performance of these sensors, which exhibit reproducible and stable responses, was evaluated as function of different gas atmospheres and dissipated power by the heater, demonstrating that this technological approach could be used to develop functional devices based on nanomaterials.

Keywords

nanostructuremicroelectro-mechanical (MEMS)sensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD08-02
Copyright
Copyright © Materials Research Society 2008

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