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MEMS Lubrication: An Atomistic Perspective of a Bound + Mobile Lubricant

Published online by Cambridge University Press:  01 February 2011

Douglas Lee Irving  and
Donald W Brenner
Douglas Lee Irving
Affiliation:
[email protected], North Carolina State University, Materials Science and Engineering, Box 7907, Raleigh, NC, 27695-7907, United States, 919-513-2424
Donald W Brenner
Affiliation:
[email protected], North Carolina State University, Materials Science and Engineering, Box 7907, Raleigh, NC, 27695-7907, United States
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Abstract

The adhesive pressure needed to separate two ocatdecyltrichlorosilane (ODTS) coated surfaces both with and without the addition of tricresyl phosphate (TCP) as a function of separation rate is characterized using molecular dynamics simulation. The simulations predict that when TCP is added between surfaces the adhesive pressure needed for separation is reduced compared to the system containing ODTS only. Both the adhesive pressure and the break up of the TCP layers exhibit a separation rate dependence that appears unrelated to the rate of diffusion of TCP on the ODTS. The ability of the TCP to remain localized to defected areas of the ODTS layer upon normal separation of the contact is also characterized. It is found that the TCP remains localized to defect sites, which effectively coats the damaged area.

Keywords

adhesionmicroelectro-mechanical (MEMS)lubricant
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD01-09
Copyright
Copyright © Materials Research Society 2008

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