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Determination of activation energy of intermixing in textured metal-metal multilayer films via two-dimensional X-ray diffraction

Published online by Cambridge University Press:  20 May 2016

Mark A. Rodriguez ,
David P. Adams  and
Ralph G. Tissot
Mark A. Rodriguez
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico87185-1411
David P. Adams
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico87185-1411
Ralph G. Tissot
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico87185-1411
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Abstract

Activation energies for the intermixing reaction of textured metal-metal multilayer thin films have been determined using X-ray diffraction analysis. Kinetic data were collected utilizing an area detector so as to reduce intensity bias from changes in out-of-plane texture during the intermixing reaction. Activation energies for Al/Pt, Ni/Ti, and Co/Al metal-metal multilayer thin films have been determined as 95.4(2) kJ/mol, 201(13) kJ/mol, and 247(19) kJ/mol, respectively.

Keywords

activation energyNiTiAlPtCoAlmultilayer thin film
Type
X-Ray Diffraction
Information
Powder Diffraction , Volume 24 , Special Issue 2 , June 2009 , pp. 82 - 84
Copyright
Copyright © Cambridge University Press 2009

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