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ZnO Thin Films Grown at Various Substrate Angles by Pulsed Laser Deposition

Published online by Cambridge University Press:  01 February 2011

Jeong Seok Kang ,
Hong Seong Kang ,
Jae Won Kim  and
Sang Yeol Lee
Sang Yeol Lee
Affiliation:
Department of Electrical and Electronic Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul, 120-749, Korea
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Abstract

ZnO thin films were grown with different plume-substrate angles and growth times by pulsed laser deposition. The angles between plume propagation direction and substrate plane were changed from 0°, 45° to 90°. The growth time was changed in order to adjust film thickness. From the XRD pattern exhibiting dominant (002) XRD peak of ZnO, all films were found to be c-axis oriented. Optical property of ZnO thin films were investigated by PL(Photoluminescence). The ratio of UV/green luminescent intensity of ZnO thin film increased, as the angle between plume and substrate plane decrease from 90° to 0°.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 764: Symposium C – New Applications for Wide-Bandgap Semiconductors , 2003 , C3.51
Copyright
Copyright © Materials Research Society 2003

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