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Xps Study of the Interface of Polyimide on Cr and Ni.

Published online by Cambridge University Press:  22 February 2011

Marco Garilli ,
Giovanni Marletta ,
Orazio Puglisi ,
Carmelo Oliveri ,
Carmelo Magro  and
Giuseppe Ferla
Marco Garilli
Affiliation:
Consorzio Catania-Ricerche, Viale A.Doria 8, Catania, ITALY
Giovanni Marletta
Affiliation:
Dipartimento di Scienze Chimiche, v.A.Doria 6, Catania, ITALY
Orazio Puglisi
Affiliation:
Dipartimento di Scienze Chimiche, v.A.Doria 6, Catania, ITALY
Carmelo Oliveri
Affiliation:
ST Microelectronics, Stradale Primosole 50, Catania, ITALY
Carmelo Magro
Affiliation:
ST Microelectronics, Stradale Primosole 50, Catania, ITALY
Giuseppe Ferla
Affiliation:
ST Microelectronics, Stradale Primosole 50, Catania, ITALY
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Abstract

The paper presents a study of three polyimide-oxide interfaces. The Cr-oxide-PI interface seems to undergo a drastic topographical structural rearrangement. The case of the Ni surface is indicative of heavy decomposition of the Ni oxide which induces the decomposition of the polymer film. On the contrary the stabilized Ni surface behaves in a normal manner indicating that the driving force for the decomposition is the instability of the oxide.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 153: Symposium J – Interfaces Between Polymers, Metals, and Ceramics , 1989 , 273
Copyright
Copyright © Materials Research Society 1989

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