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Ultrapure Iron Film Formation by Mass-Separated Ion Beam Deposition Method

Published online by Cambridge University Press:  25 February 2011

Kiyoshi Miyake ,
Kenya Ohashi  and
Matahiro Komuro
Kiyoshi Miyake
Affiliation:
Hitachi Research Laboratory, 7–1–1 Ohmika-cho, Hitachi, Ibaraki 319–12 Japan
Kenya Ohashi
Affiliation:
Hitachi Research Laboratory, 7–1–1 Ohmika-cho, Hitachi, Ibaraki 319–12 Japan
Matahiro Komuro
Affiliation:
Hitachi Research Laboratory, 7–1–1 Ohmika-cho, Hitachi, Ibaraki 319–12 Japan
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Abstract

Isotopically enriched iron (56Fe or 57Fe) films were deposited on Si(100) substrates at RT by a low-energy (50–500 eV), mass-separated ion beam deposition (IBD) method. All the IBD-Fe films had smooth and fine-grained polycrystalline bcc-structure, and showed superior electrochemical corrosion resistance against both NaCl and H2SO4 solutions compared with die highest-purity (RRRIH=6000) iron metals ever reported. A distinct energy dependence of the degree of corrosion resistance and different microcrystalline structures observed by TEM cross-sections for the 50 eV- and 100 eV-IBD-Fe films indicate that their film growth modes are completely different.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 787
Copyright
Copyright © Materials Research Society 1993

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References

1. Miyake, K. and Tokuyama, T., in Ion Beam Assisted Film Growth, edited by Itoh, T. (Elsevier Science Publishers, Amsterdam, 1989)p. 289.Google Scholar
2. Miyake, K., in Mater. Res. Soc. Symp. Proc. 157, 3(1990).Google Scholar
3. Kimura, H.: JRCM News 67 (1992) p. 2 (in Japanese).Google Scholar
4. Aono, Y., Kuramoto, E. and Kitajima, K., Proc. 6th Int. Conf. Strength of Metals and Alloys, Melbourne (Pergamon Press, Oxford and New York, 1982) p. 9.Google Scholar
5. Kuramoto, E., Aono, Y., Kitajima, K. and Takeuchi, S., Philos. Mag. A39, 717(1979) 717.Google Scholar
6. Miyake, K., to be published in J. Vac. Sci. and Technol.Google Scholar
7. Miyake, K. and Ohashi, K., to be published in Jpn. J. Appl Phys. (1992).Google Scholar
8. Aono, Y., Kuramoto, E. and Kitajima, K., Rep. Res. Inst. Appl Mech. Kyushu Univ. XXIII, No.92, p. 105 (1981).Google Scholar
9. Makii, M., Aono, Y. and Kuramoto, E., Scr. Metall. 25, 959(1991).Google Scholar
10. 63rd ed. CRC Handbook of Chemistry and Physics, edited by Weast, R. C. (CRC Press, Inc., Boca Raton, 1982) E–78.Google Scholar