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Transmission Electron Microscopy Study of Diamond Films Grown by Plasma Deposition

Published online by Cambridge University Press:  21 February 2011

M.S. Wong ,
W.A. Chiou ,
F.R. Chen ,
D.X. Li  and
R.P.H. Chang
M.S. Wong
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
W.A. Chiou
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
F.R. Chen
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
D.X. Li
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
R.P.H. Chang
Affiliation:
Materials Research Center, Northwestern University, Evanston, IL 60208
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Abstract

The morphology and crystal structure of diamond crystallites grown by radio frequency (RF) and microwave (MW) plasma enhanced chemical vapor deposition (PECVD) under comparable conditions are examined by electron microscopy and found to be a strong function of the plasma. A novel TEM sample preparation method is developed to examine the internal structure of diamond as well as interfacial structure between diamond and substrate by direct deposition of diamond crystallites on prethinned metal grids. The diamond crystallites grown by RF PECVD are highly defective and composed of nanocrystalline grains of random orientation while those grown by MW PECVD are wellfaceted and process near perfect long range order in crystal structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989 , 363
Copyright
Copyright © Materials Research Society 1989

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References

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