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Temperature Dependence of Residual Stresses and Stress Relaxation in Blanket Films of Various Thicknesses

Published online by Cambridge University Press:  21 February 2011

A. P. Clarke ,
G. Langelaan  and
S. Saimoto
A. P. Clarke
Affiliation:
Now at Chalk River Laboratories, AECL Research, Chalk River Ontario, KOJ 1J0
G. Langelaan
Affiliation:
Department of Materials and Metall. Eng., Queen’s University, Kingston, Ontario, K7L 3N6
S. Saimoto
Affiliation:
Department of Materials and Metall. Eng., Queen’s University, Kingston, Ontario, K7L 3N6
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Abstract

A rapid method to measure residual strains using x-rays during continuous temperature ramping has been developed whereby resolution of ±5xl0-5 can be attained with 2θ scans of about one minute using low index reflections. The method was used to make residual stress measurements during temperature cycling at heating rates of 2 to 15°C/min with interrupted stress relaxations at 235°C and 130°C on pure Al blanket films of 0.24μm, 0.58μm and 1.01 μm thicknesses. The results are consistent with the notion that surface sources are activated by the back stress of misfit dislocations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 609
Copyright
Copyright © Materials Research Society 1995

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