Published online by Cambridge University Press: 21 February 2011
Amorphous ZrCo-alloy films, prepared by electron beam deposition in ultra high vacuum (UHV), are investigated in situ with scanning tunneling microscopy (STM) in constant current mode. The topographs, statistically analysed by height-height-correlation functions, show a surface roughness on two different length scales. The surface structures on a larger scale (7.0 to 12.0nm in diameter), which vary with substrate temperature, film composition and film thickness, are discussed in relation to surface tension and diffusion kinetics during film growth. The structures on a smaller scale (0.4 to 0.7nm in diameter) have to be discussed with respect to the limits of atomic resolution.