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Resonant Sensors for Microfluidic Applications

Published online by Cambridge University Press:  01 February 2011

Florentina Niebelschütz ,
Katja Tonisch ,
Volker Cimalla ,
Klemens Brückner ,
Ralf Stephan ,
Matthias Hein ,
Andreas Schober  and
Oliver Ambacher
Florentina Niebelschütz
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany, +493677693352, +493677693355
Katja Tonisch
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Volker Cimalla
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Klemens Brückner
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Ralf Stephan
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Matthias Hein
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Andreas Schober
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
Oliver Ambacher
Affiliation:
[email protected], Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Gustav-Kirchhoff-Str. 7, Ilmenau, 98693, Germany
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Abstract

In this work we present both resonators working at ambient conditions and their first application as a biological and physical sensor. Singly- and doubly-clamped resonators of different geometries were realized using active layers of silicon carbide and aluminum nitride. The resonators were excited by magneto-motive actuation. The quality factor reached 350 and 50000 in air and in vacuum (2-5 10−5 mbar), respectively, which is sufficient for sensing applications in air. The resonance shift caused by mass loadings in the range of picograms and by single biological cells was measured at ambient conditions. Initial non-resonant measurements in liquids such as propanol were performed to investigate the possibility of viscosity measurements in small volumes such as microfluidic channels and droplets.

Keywords

microelectro-mechanical (MEMS)sensorfluid
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 951: Symposium E – Nanofunctional Materials, Nanostructures and Novel Devices for Biological and Chemical Detection , 2006 , 0951-E05-07
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

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