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Optical Fibers with Patterned ZnO/Electrode Coatings for Flexural Actuators

Published online by Cambridge University Press:  10 February 2011

S. Trolier-McKinstry ,
G. R. Fox ,
A. Kholkin ,
C. A. P. Muller  and
N. Setter
S. Trolier-McKinstry
Affiliation:
Visiting Scientist from the Materials Research Laboratory of the Pennsylvania State University, University Park, PA, USA, [email protected]
G. R. Fox
Affiliation:
Laboratory of Ceramics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
A. Kholkin
Affiliation:
Laboratory of Ceramics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
C. A. P. Muller
Affiliation:
Laboratory of Ceramics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
N. Setter
Affiliation:
Laboratory of Ceramics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
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Abstract

Piezoelectric ZnO coatings were used in this work to develop a flexural actuator for an optical fiber. The basic device geometry was as follows: inner Cr/Au electrodes were evaporated onto a cleaned optical fiber; a thick ZnO coating was then grown by sputtering; finally a set of 2mm ring top electrodes were deposited through a shadow mask. Flexural actuators were made by photolithographically patterning either the inner or outer Cr/Au drive electrodes so that it was split down the length of the fiber. This enables each half of the fiber to be actuated independently. The result is that the optical fiber is forced to flex.

A processing scheme by which 30 μm gaps could be patterned into the electrodes was developed using standard clean room techniques. Such flexural actuators are attractive for scanning near field optical microscopes and in fiber alignment devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 459: Symposium Y – Materials for Smart Systems II , 1996 , 189
Copyright
Copyright © Materials Research Society 1997

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References

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