Hostname: page-component-745bb68f8f-b6zl4 Total loading time: 0 Render date: 2025-01-27T02:55:03.268Z Has data issue: false hasContentIssue false
  • English
  • Français

Ni/Si-Based Contacts to GaN: Thermally Activated Structural Transformations Leading to Ohmic Behavior

Published online by Cambridge University Press:  15 February 2011

E. Kaminska ,
A. Piotrowska ,
J. Jasinski ,
J. Kozubowski ,
A. Barcz ,
K. Golaszewska ,
D.B. Thomson ,
R.F. Davis  and
M.D. Bremser
E. Kaminska
Affiliation:
Institute of Electron Technology, Al.Lotnikow 46, Warsaw, Poland, [email protected].
A. Piotrowska
Affiliation:
Institute of Electron Technology, Al.Lotnikow 46, Warsaw, Poland, [email protected].
J. Jasinski
Affiliation:
Institute of Experimental Physics, Warsaw University, Warsaw, Poland
J. Kozubowski
Affiliation:
Faculty of Material Science and Eng., Warsaw Technical University, Warsaw, Poland
A. Barcz
Affiliation:
Institute of Electron Technology, Al.Lotnikow 46, Warsaw, Poland, [email protected].
K. Golaszewska
Affiliation:
Institute of Electron Technology, Al.Lotnikow 46, Warsaw, Poland, [email protected].
D.B. Thomson
Affiliation:
Department of Material Science and Eng., NCSU, Raleigh, NC 27695-7907, USA
R.F. Davis
Affiliation:
Department of Material Science and Eng., NCSU, Raleigh, NC 27695-7907, USA
M.D. Bremser
Affiliation:
Aixtron, Inc., Buffalo Grove, IL 60089, USA
Get access

Abstract

Structural transformations in Ni/Si-based contacts to GaN occurring under heat treatment have been studied using transmission electron microscopy and secondary ion mass spectrometry. Transition from non-ohmic to ohmic behavior correlates with reaction between Ni and Si, and decomposition of the initially formed interfacial Ni:Ga:N layer. Transport of dopant atoms from metallization into GaN testifies in favour of the SPR process of ohmic contact formation

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 537: Symposium G – GaN and Related Alloys , 1998 , G9.9
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Murakami, M., Koide, Y., Critical Reviews in Solid State and Materials Science, 23, 1 (1998).Google Scholar
2. Sands, T., Marshall, E.D., Wang, L.C., J.Mater.Res. 3, 914 (1988).Google Scholar
3. Kaminska, E., Piotrowska, A., Barcz, A., Guziewicz, M., Kasjaniuk, S., Bremser, M.D., Davis, R.F., Dynowska, E., Kwiatkowski, S., Mat.Res.Soc.Symp.Proc., vol. 482, 1077 (1998).Google Scholar
4. Weaks, T.W. Jr, Bremser, M.D., Ailey, K.S., Carlson, E., Perry, W.G., Piner, E.L., El-Masry, N.A., Davis, R.F., J.Mater.Res., 10, 1011 (1996).Google Scholar
5. Hansen, M., Anderko, K., Constitution of Binary Alloys, (McGrow-Hill Book Company, Inc., London, 1958).Google Scholar