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Mechanical Properties and Residual Stresses in Oxide/Metal Multilayer Films Synthesized by Ion Beam Assisted Deposition

Published online by Cambridge University Press:  15 February 2011

C. E. Kalnas ,
L. J. Parfitt ,
M. G. Goldiner ,
G. S. Was  and
J. W. Jones
C. E. Kalnas
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
L. J. Parfitt
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
M. G. Goldiner
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
G. S. Was
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
J. W. Jones
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI.
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Abstract

Films of Al, Al2O3 and Al/Al2O3 microlaminates were formed by ion beam assisted deposition (IBAD) at R ratios from 0.0025 to 0.5 and film thicknesses between 150 and 2600 nm. Oxide films were amorphous while metal layers were crystalline with small grains and texture for both PVD and IBAD conditions. The average stress in the oxide film is tensile at R=0 and becomes compressive, saturating at approximately 15 eV/atom. The residual stress in the Al films is tensile over all R ratios and the stress in the microlaminate roughly follows a rule of mixtures. Deformation of ductile substrates on which films had been deposited revealed that the critical strain to fracture was strongly dependent on residual stress. Large compressive stresses in monolithic films produced by ion beam assisted deposition delayed the onset of crack initiation while the presence of multiple layers, in general, lowered the crack density at saturation, suggesting a possible ductilizing effect.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 695
Copyright
Copyright © Materials Research Society 1993

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References

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