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Measurement of Stresses in Thin Films Using Holographic Interferometry: Dependence on Atmospheric Conditions

Published online by Cambridge University Press:  16 February 2011

Michele A. Maden ,
Kun Tong  and
Richard J. Farris
Michele A. Maden
Affiliation:
Polymer Science and Engineering Department, University of Massachusetts, Amherst, MA 01003
Kun Tong
Affiliation:
Polymer Science and Engineering Department, University of Massachusetts, Amherst, MA 01003
Richard J. Farris
Affiliation:
Polymer Science and Engineering Department, University of Massachusetts, Amherst, MA 01003
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Abstract

The direct measurement of stresses in spin-coated thin films is crucial for understanding their end use capabilities. A new technique for measuring the residual biaxial curing stresses in spin coated polymer films has been developed. This technique uses holographic interferometry to observe the modes of vibration of a membrane under biaxial tension. The stress in the film can then be determined by application of the vibrating membrane equation. A great advantage of this technique is that the material constants of the film do not enter into the analysis. The only material parameter needed is the density. In thispaper, we will examine membranes of polyimide and biaxially stretched rubber and latex. It is possible, using this technique to resolve the principal stresses and directions in films with complicated stress states.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 29
Copyright
Copyright © Materials Research Society 1990

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References

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