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Laser Ultrasonic Measurement of Thin Film Elastic Properties

Published online by Cambridge University Press:  26 February 2011

Sarah E. Bobbin ,
J. W. Wagner  and
R. C. Cammarata
Sarah E. Bobbin
Affiliation:
The Johns Hopkins University, Department of Materials Science and Engineering, 34th and Charles Streets, Baltimore, Maryland 21218
J. W. Wagner
Affiliation:
The Johns Hopkins University, Department of Materials Science and Engineering, 34th and Charles Streets, Baltimore, Maryland 21218
R. C. Cammarata
Affiliation:
The Johns Hopkins University, Department of Materials Science and Engineering, 34th and Charles Streets, Baltimore, Maryland 21218
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Abstract

A technique is presented for measurement of elastic properties of thin films from 0.001-0.025 mm in thickness. Lamb Waves were excited in free standing films with a pulsed Nd:YAG laser, and detected using heterodyne interferometry. Elastic properties were calculated from time-of-flight measurements. Variability in waveform structure with film thickness was observed, and interpreted with respect to extraction of elastic property information. An explanation is offered for changes in waveform structure, and common features are highlighted.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 226: Symposium H – Mechanical Behavior of Materials and Structures in Microelectronics , 1991 , 231
Copyright
Copyright © Materials Research Society 1991

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References

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