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Investigations of Substrate-Selective Covalent Attachment for Genetically-Engineered Molecular Interconnects

Published online by Cambridge University Press:  01 February 2011

N. Rana ,
K. Bousman ,
G. S. Shekhawat ,
G. Sirinakis ,
F. Heuchling ,
J. Welch ,
E. T. Eisenbraun ,
R. E. Geer  and
A. E. Kaloyeros
N. Rana
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
K. Bousman
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
G. S. Shekhawat
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
G. Sirinakis
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
F. Heuchling
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
J. Welch
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
E. T. Eisenbraun
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
R. E. Geer
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
A. E. Kaloyeros
Affiliation:
University at Albany Institute for Materials, Albany, NY 12203
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Abstract

Experimental investigations are presented regarding the surface-selective molecular selfassembly of fluorinated monochloroalkylsilane of the type (heptadecafluoro-1,1,2,2-tetrahydrodecyl) dimethylchlorosilane (denoted F17) on silicon dioxide (SiO2) and silicon nitride (Si3N4) surfaces. The goal is to investigate the controlled and selective surface self-assembly of these molecules as a potential route for substrate-selective covalent bonding of complex molecular assemblies to semiconductor substrates for on-chip interconnect and device applications. X-ray photoelectron spectroscopy (XPS), x-ray reflectivity (XRR) and atomic force microscopy (AFM) have been used to investigate the selectivity of the F17 self-assembly. Contrary to previous reported results, a high degree of F17 monolayer attachment selectivity is consistently observed between SiO2 and Si3N4 substrates for all three of the aforementioned monolayer characterization methods.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 728: Symposium S – Functional Nanostructured Materials through Multiscale Assembly and Novel Patterning Techniques , 2002 , S8.4
Copyright
Copyright © Materials Research Society 2002

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