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In-Situ Gas Conversion Using a Wide Area Disc Shaped He-H2 Plasma and Organometallic Feedstocks

Published online by Cambridge University Press:  21 February 2011

B. Pihlstrom ,
T. Sheng ,
Z. Yu  and
G. Collins
B. Pihlstrom
Affiliation:
Dept. Electrical Engineering, Colorado State University, Fort Collins, CO 80523
T. Sheng
Affiliation:
Dept. Electrical Engineering, Colorado State University, Fort Collins, CO 80523
Z. Yu
Affiliation:
Dept. Electrical Engineering, Colorado State University, Fort Collins, CO 80523
G. Collins
Affiliation:
Dept. Electrical Engineering, Colorado State University, Fort Collins, CO 80523
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Abstract

A wide area disc shaped plasma source of 20cm in diameter generated by a ring shaped cathode electron beam is used to decompose Trimethylgallium (TMGa) and Trimethylarsenic (TMAs). Volume photo-absorption of VUV photons and sensitized atom-molecule collisions with excited species and radicals can all assist dissociation of the organometallic feedstock reactants. In addition, the excited radical flux and VUV impingement on the film may also assist heterogeneous surface reactions and increase surface mobility of absorbed species. Mass spectrometry studies using deuterium as a replacement for hydrogen as a trace gas allowed for the elicidation of decomposition pathways of TMGa and TMAs. Byproducts of hydrogen and helium plasmas were also studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 165 , 1989 , 215
Copyright
Copyright © Materials Research Society 1990

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