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Indentation Creep Analysis of Amorphous Nitrogen-Containing Carbon Films

Published online by Cambridge University Press:  10 February 2011

Daisuke Tanaka ,
Shigeo Ohshio  and
Hidetoshi Saitoh
Daisuke Tanaka
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Ngaoka Niigata, 940-21 JAPAN
Shigeo Ohshio
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Ngaoka Niigata, 940-21 JAPAN
Hidetoshi Saitoh
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Ngaoka Niigata, 940-21 JAPAN
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Abstract

An indentation creep analysis has been performed to investigate micro-mechanical properties of amorphous nitrogen-containing carbon films. Using results of the slope of the time-displacement relation of creep procedure, the strain rate sensitivity exponent m is obtained. The m value of 0.004 was obtained for diamond-like carbon film without nitrogen. In contrast, those were found to be in the range between 0.009 and 0.101 for nitrogen-containing carbon films. These slightly increased with increasing the nitrogen content of the films. We present results that indicate that the nano-indentation creep technique enables clarification of the nano-structure of nitrogen-containing carbon films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 205
Copyright
Copyright © Materials Research Society 1998

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References

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