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Fracture Strength of A1203 Insulating Thin Film for High Density Wiring Substrate

Published online by Cambridge University Press:  26 February 2011

Masahiro Jono  and
Atsushi Sugeta
Masahiro Jono
Affiliation:
Osaka University, Dept. of Mechanical Engineering, 2-1 Yamada-oka, Suita city, 565, Japan
Atsushi Sugeta
Affiliation:
Osaka University, Dept. of Mechanical Engineering, 2-1 Yamada-oka, Suita city, 565, Japan
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Abstract

Fracture strength of amorphous A1203 insulating thin film coated on a Fe-42%Ni base metal was Investigated under static and cyclic loadings by using four point bending apparatus. It was found that the both static and cyclic fracture strength of thin film decreased with increasing coating thickness and also fracture under cyclic loading occurred at a strain below the static fracture strength. Observations In detail by the optical and scanning electron microscopes revealed that the splash particles deposited in coating process caused crack initiation origins. Evaluation method of fracture strength of thin films was discussed based on the fracture mechanics approach.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 226: Symposium H – Mechanical Behavior of Materials and Structures in Microelectronics , 1991 , 303
Copyright
Copyright © Materials Research Society 1991

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