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Fabrication of Discrete Track Media with Patterned Servo-areas and Tracks on Disk Substrate

Published online by Cambridge University Press:  26 February 2011

Yuko Tsuchiya ,
Kenichi Ito ,
Chiseki Haginoya  and
Yoshiyuki Hirayama
Yuko Tsuchiya
Affiliation:
[email protected], Hitachi, Ltd., Central Research Laboratory, Magnetic Drive Technology Research Department, 1-280, Higashi-Koigakubo, Kokubunji, 1858601, Japan, +81-42-323-1111, +81-42-327-7709
Kenichi Ito
Affiliation:
[email protected], Hitachi, Ltd., Central Research Laboratory, Magnetic Drive Technology Research Department, 1-280, Higashi-Koigakubo, Kokubunji, 1858601, Japan
Chiseki Haginoya
Affiliation:
[email protected], Hitachi, Ltd., Central Research Laboratory, Magnetic Drive Technology Research Department, 1-280, Higashi-Koigakubo, Kokubunji, 1858601, Japan
Yoshiyuki Hirayama
Affiliation:
[email protected], Hitachi, Ltd., Central Research Laboratory, Magnetic Drive Technology Research Department, 1-280, Higashi-Koigakubo, Kokubunji, 1858601, Japan
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Abstract

Discrete track media (DTM) with patterned servo-areas and recording tracks were fabricated on disk substrates in a two-step RIE process, creating a fine pattern transfer from an imprinted resist mask to a substrate surface without variations in groove depth. The fabricated DTM with perpendicular magnetic recording layers flew stably during read out signal detection.

Keywords

lithography (removal)reactive ion etchingmagnetic
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1032: Symposium I – Nanoscale Magnetic Materials and Applications , 2007 , 1032-I05-07
Copyright
Copyright © Materials Research Society 2008

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References

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