Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-08T03:33:52.904Z Has data issue: false hasContentIssue false
  • English
  • Français

Diamond Synthesis From Acetone Vapor And Impurity Control

Published online by Cambridge University Press:  11 February 2011

Kaoru Gyoda ,
Yuki Tanaka  and
Yoshiki Takagi
Kaoru Gyoda
Affiliation:
Teikyo University of Science & Technology, 2525, Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, JAPAN.
Yuki Tanaka
Affiliation:
Teikyo University of Science & Technology, 2525, Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, JAPAN.
Yoshiki Takagi
Affiliation:
Teikyo University of Science & Technology, 2525, Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, JAPAN.
Get access

Abstract

We synthesized diamond via gaseous phase of vaporized acetone. Molecular acetone decomposes to two methyl radicals with thermal activation. We propose here a new method for diamond synthesis with these methyl radicals from molecular acetone. With this method, we successfully synthesized diamond particles on Si substrates with shorter experimental time and lower energy consumption than conventional methods. With liquid carbon sources, such as acetone, impurity elements will be easily substituted in synthesized diamond thin film, which has wide applications for the future electronic devices. Nickel, Boron and Phosphorus doping results will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W18.3
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Angus, J. C., Will, H. A. and Stanko, W. S.: Journal of Applied Physics 39, 2915 (1968)Google Scholar
[2] Kamo, M., Sato, Y., Matsumoto, S., Setaka, H.: Journal of Crystal Growth 62, 642 (1983)Google Scholar
[3] Genchi, Y, Yasuda, and Komiyama, T.. H: International Chemical Engineering 32(3), 560–569 (1992)Google Scholar
[4] May, Tsang R. S.: International Chemical Engineering 32(3), 560–569 (1992)Google Scholar
[5] Hirose, Y.: Proceeding of 1st International Conference for New Diamond Science and Technology P.51, KTK Terra Publish. (Tokyo, 1988)Google Scholar
[6] Takagi, Y., Sato, S., Kaigawa, K., Sawaoka, A. B. and Regel, L. L.: Microgravity Quarterly, 2(1), 39–42 (1992)Google Scholar
[7] Sato, S., Kaigawa, K., Takagi, Y., Hirose, Y. and Sawaoka, A. B.: Journal of the Japan Society of Microgravity Application 10(1), 38–45 (1993)Google Scholar
[8] Tanabe, Y., Kaigawa, K., Takagi, Y. and Sawaoka, A. B.: Journal of the Japan Society of Microgravity Application 11 (2), 71–79 (1994)Google Scholar
[9] Takagi, Y., Hibiya, K. and Takeuchi, H.: Journal of the Japan Society of Microgravity Application 13(4), 225–233 (1996)Google Scholar
[10] Takagi, Y., Regel, L. L. and Wilcox, W. R.: Transaction of the Materials Research Society of Japan 24(4), 513–518 (1999)Google Scholar
[11] Takagi, Y., Regel, L. L. and Wilcox, W. R.: Journal of the Japan Society of Microgravity Application 15(3), 140–145 (1998)Google Scholar
[12] Takagi, Y., Suzuki, M., Abe, H. and Inatomi, Y.: Journal of the Japan Society of Microgravity Application 17(3), 159–165 (2000)Google Scholar
[13] Uede, Mayu and Takagi, Yoshiki: J. mater. Res., 16(11), 3069–3072 (2001)Google Scholar
[14] Fabisiak, K., et al., Diamond and Related Materials, 1, 77(1992)Google Scholar
[15] Okoshi, M., et al., Applied Surface Science, 154–155, 376–381 (2000)Google Scholar
[16] Onishi, F., Hayashi, R., Takagi, Y., Mat. Res. Soc. Proc. Vol.672 2001 Materials Research Society, O8.13 Google Scholar