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Determination of the Mechanical Properties of Polysilicon Thin Films Using Bulge Testing

Published online by Cambridge University Press:  10 February 2011

S. Jayaraman ,
R. L. Edwards  and
K. J. Hemker
S. Jayaraman
Affiliation:
Department of Materials Science and Engineering
R. L. Edwards
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Baltimore, MD.
K. J. Hemker
Affiliation:
Department of Materials Science and Engineering
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Abstract

Using standard deposition and micromachining techniques, silicon substrates with square and rectangular windows covered with membranes of polycrystalline silicon (polysilicon) have been fabricated. Pressure-displacement curves obtained during the bulge testing of membranes with the above geometries have been used to determine the elastic constants E and v of the polysilicon. The results obtained (E = 162± 4 GPa and v = 0.19±0.03) are in good agreement with literature values for bulk polycrystalline silicon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 623
Copyright
Copyright © Materials Research Society 1998

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References

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