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Determination Of Temperature Dependent Unstressed Lattice Spacings In Crystalline Thin Films On Substrates

Published online by Cambridge University Press:  10 February 2011

G. Cornella ,
S. Lee ,
O. Kraft ,
W. D. Nix  and
J. C. Bravman
G. Cornella
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
S. Lee
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
O. Kraft
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
W. D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
J. C. Bravman
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
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Abstract

X-ray strain analysis via Generalized Focusing Diffractometry (GFD) [1], and the concurrent need for accurate values of the unstrained lattice parameter, are discussed. A new method for determining the unstrained lattice parameter without knowledge of the elastic constants of the sample material is described. Stress measurements at varying temperatures, and extraction of the coefficient of thermal expansion from these measurements, are demonstrated for aluminum and gold films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 527
Copyright
Copyright © Materials Research Society 1998

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References

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