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Deposition of Nanostructured Silicon Thin Films by Means of the Selective Contribution of Particles in Pecvd

Published online by Cambridge University Press:  10 February 2011

J. Costa ,
P. Roura ,
Procai Cabarrocas ,
G. Viera  and
E. Bertran
J. Costa
Affiliation:
GRM, Departament d'Enginyeria Industrial, Universitat de Girona, Avgda. Lluis Santaló s/n. E17071 Girona. Catalonia, (Spain). [email protected]
P. Roura
Affiliation:
GRM, Departament d'Enginyeria Industrial, Universitat de Girona, Avgda. Lluis Santaló s/n. E17071 Girona. Catalonia, (Spain). [email protected]
Procai Cabarrocas
Affiliation:
LPICM (UMR 7647 CNRS) École Polytechnique, 91128 Palaiseau, Cedex, France
G. Viera
Affiliation:
Dept. De Física Aplicadai Òptica., Universitat de Barcelona, Avgda. Diagonal 647, E08028 Barcelona. Catalonia, (Spain)
E. Bertran
Affiliation:
Dept. De Física Aplicadai Òptica., Universitat de Barcelona, Avgda. Diagonal 647, E08028 Barcelona. Catalonia, (Spain)
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Abstract

PECVD processes are the most common way of growing amorphous and microcrystalline silicon thin films. These low pressure plasmas are known to generate large amounts of particles in the gas phase which may be a source of contamination in the production of silicon based devices. In this report, however, we show that these particles can be incorporated profitably into a growing film, provided that their size is controlled. The Modulation of the RF power is a direct method of controlling particle size. Plasma characteristics determine the dynamics of particle formation, whereas the duration of the plasma-on period controls the particle's size and atomic structure. The size and atomic structure of particles from two different periods of the same discharge were investigated. Their main characteristics, monodisperse size distribution and ordered atomic structure, are discussed in the context of the latest findings on particle nucleation and coagulation.

A semi-phenomenological model was used to show that, during the first milliseconds of the discharge, particles of 1–2 nm that are electrically neutral may leave the plasma and contribute to the growth of the film. Although these particles could not be observed on the TEM grid, their contribution to film growth might be relevant.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 507: Symposium A – Amorphous & Microcrystalline Silicon Technology 1998 , 1998 , 499
Copyright
Copyright © Materials Research Society 1998

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References

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