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CMP Active Diamond Characterization and Conditioner Wear

Published online by Cambridge University Press:  01 February 2011

Leonard Borucki ,
Rumin Zhuang ,
Yun Zhuang ,
Ara Philipossian  and
Naoki Rikita
Leonard Borucki
Affiliation:
[email protected], Araca Incorporated, R&D, 3831 E. Ivy St, Mesa, AZ, 85205, United States, 480-748-5105
Rumin Zhuang
Affiliation:
[email protected], The University of Arizona, Chemical and Environmental Engineering, Tucson, AZ, 85721, United States
Yun Zhuang
Affiliation:
[email protected], Araca Incorporated, Tucson, AZ, 85720, United States
Ara Philipossian
Affiliation:
[email protected], Araca Incorporated, Tucson, AZ, 85720, United States
Naoki Rikita
Affiliation:
[email protected], Mitsubishi Materials Corporation, Omiya, N/A, Japan
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Abstract

Using a pad substitute material, we measure the number of active or working diamonds on a conditioner and find that it is generally a small fraction of the total number on the disc. The number of active diamonds also increases with the applied load and varies somewhat with sliding direction. However, even among the active diamonds, most do relatively little cutting. A few diamonds on a disc do most of the deep bulk cutting, a larger fraction skim the higher areas of the pad surface and most of the diamonds on the disc apparently merely help to support the load. While all of the diamonds that make contact, cutting or otherwise, may show evidence some of mechanical wear, wear of the small number of deep bulk cutting diamonds may be responsible for declining cut rates and for surprisingly low observed conditioner lifetimes.

Keywords

microelectronicsCMPtribology
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 991: Symposium C – Advances and Challenges in Chemical Mechanical Planarization , 2007 , 0991-C01-01
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1Method of Determining the Number of Active Diamonds on a Conditioning Disk, U.S. and foreign patents applied for, US11/528,835.Google Scholar
2Lexan XL10 Produce Data Sheet, available from GE Plastics.Google Scholar
3 Borucki, L., Rikita, N., Zhuang, Y., Lee, H., Zhuang, R., Yamashita, T., Kikuma, R. and Philipossian, A., Proc. 2006 CMP-MIC Conference, pp. 272–279.Google Scholar
4 , D. Rosales-Yeomansm, Borucki, L., Doi, T., Lujan, L. and Philipossian, A., J. Electrochem. Soc. 153(4), pp. G272–G277 (2006).Google Scholar