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Amorphous Diamond-Like Carbon Film Growth by KrF-and Arf-Excimer Laser Pld: Correlation with Plume Properties

Published online by Cambridge University Press:  21 February 2011

A. A. Puretzky ,
D. B. Geohegan ,
G. E. Jellison Jr.  and
M. M. Mcgibbon
A. A. Puretzky
Affiliation:
institute of Spectroscopy, Troitsk, Russia
D. B. Geohegan
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN
G. E. Jellison Jr.
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN
M. M. Mcgibbon
Affiliation:
University of Glasgow, Glasgow, United Kingdom
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Abstract

A comparative study of arF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality arF- and KrF-laser deposited films (up to 84% of sp3 bonded carbon in 7 J/cm2 -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by arF- and KrF- lasers. KrF-laser (6.7 J/cm2) irradiation produces a less energetic carbon plasma containing larger amounts of C2 and probably larger clusters compared with arF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized arF-laser carbon plasma results in the better diamond-like properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 388: Symposium Q – Film Synthesis and Growth Using Energetic Beams , 1995 , 145
Copyright
Copyright © Materials Research Society 1995

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