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Structure and Morphology of Vitreous Chalcogenide Thin Films Obtained by Plasma-Enhanced CVD

Published online by Cambridge University Press:  21 February 2011

Michel Ribes ,
Bernard Cros ,
Serge Peytavin ,
Henri Camon  and
Jean-Louis Balladore
Michel Ribes
Affiliation:
Laboratoire de Physicochimle des Matbrlaux Solides, U.R.A. D0407, USTL, Place Eugene Bataillon, 34095 Montpellier Cedex 2, France
Bernard Cros
Affiliation:
Laboratoire de Physicochimle des Matbrlaux Solides, U.R.A. D0407, USTL, Place Eugene Bataillon, 34095 Montpellier Cedex 2, France
Serge Peytavin
Affiliation:
Laboratoire de Physicochimle des Matbrlaux Solides, U.R.A. D0407, USTL, Place Eugene Bataillon, 34095 Montpellier Cedex 2, France
Henri Camon
Affiliation:
CEMES-LOE, 29, rue Jeanne Marvlg, 31055 Toulouse, France
Jean-Louis Balladore
Affiliation:
CEMES-LOE, 29, rue Jeanne Marvlg, 31055 Toulouse, France
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Abstract

Thin films of chalcogenide glasses GeSeywere prepared by PECVD for lithographic applications. Their structure and morphology were characterized by EXAFS and electron microscopy. EXAFS studies enabled comparison of the structures of thin films and those of homologous bulk glasses. Morphology studies by SEM and TEM revealed an heterogeneous structure explained by a phase separation: these glasses consist of microdomains whose size varies with the overall GeSey composition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 165 , 1989 , 233
Copyright
Copyright © Materials Research Society 1990

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