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Real Time Monitoring Of The Optical Properties Of Cw Laser Annealed Silicon

Published online by Cambridge University Press:  15 February 2011

John F. Ready ,
B. Thompson Mcclure ,
Terry L. Brewer  and
William L. Larson
John F. Ready
Affiliation:
+Honeywell Corporate Technology Center, 10701 Lyndale Avenue South, Bloomington, MN 55420, USA
B. Thompson Mcclure
Affiliation:
+Honeywell Corporate Technology Center, 10701 Lyndale Avenue South, Bloomington, MN 55420, USA
Terry L. Brewer
Affiliation:
++Honeywell Solid State Electronics Center, 12001 Highway 55, Plymouth, MN 55441, USA
William L. Larson
Affiliation:
++Honeywell Solid State Electronics Center, 12001 Highway 55, Plymouth, MN 55441, USA
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Abstract

The surface reflectivity of ion implanted silicon is a function of the entire past history of the material, including the nature of the implanted species and the implant dose. It is influenced by interference effects, arising from discontinuities in index of refraction at the surface and at the boundary between damaged and undamaged material. The reflectivity may be either higher or lower than that of the unimplanted silicon. As the crystalline silicon regrows from below, the reflectivity changes because of variable constructive or destructive interference. This paper describes monitoring of the surface reflectivity during continuous laser annealing. The beam from a continuous argon ion laser is scanned in a raster pattern over the silicon surface. The surface reflectivity for a HeNe laser beam is monitored as a function of time during crystalline regrowth. The reflectivity contains an oscillatory component which arises because of changes in interference due to the decreasing thickness of the noncrystalline layer. The oscillatory behavior produces a signature characteristic of the annealing. The reflectivity monitoring technique is useful for investigating the influence of parameters such as the spatial profile of the laser beam and the implantation dose on the annealing characteristics. The results are correlated with measurements of the depth profile of the implanted ions, as revealed by anodic oxidation and stripping.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1: Symposium – Laser and Electron-Beam Solid Interactions in Materials Processing , 1980 , 133
Copyright
Copyright © Materials Research Society 1981

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References

REFERENCES

1. Auston, D.H. et al. . (1978) Appl. Phys. Lett., 33, 437–440.Google Scholar
2. Auston, D.H. et al. (1979) Appl. Phys. Lett., 34, 777–779.Google Scholar
3. Auston, D.H. et al. . (1978) Appl. Phys. Lett., 33, 539–541.Google Scholar
4. Heavens, O.S. (1965) Optical Properties of Thin Solid Films. Dover Publications, Inc., New York, pp. 76–77.Google Scholar
5. Schultz, J.C. and Collins, R.J. (1979) Appl. Phys. Lett., 34, 84–87.CrossRefGoogle Scholar