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Nanoprober-Based Pick-and-Place Process for Site-Specific Characterization of Individual Carbon Nanotubes

Published online by Cambridge University Press:  01 February 2011

Thomas Hantschel ,
Peter Ryan ,
Saku Palanne ,
Oliver Richard ,
Kai Arstila ,
Anne S. Verhulst ,
Hugo Bender ,
Xiaoxing Ke  and
Wilfried Vandervorst
Thomas Hantschel
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Peter Ryan
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Saku Palanne
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Oliver Richard
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Kai Arstila
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Anne S. Verhulst
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Hugo Bender
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
Xiaoxing Ke
Affiliation:
[email protected], University of Antwerp, EMAT, Groenenborgerlaan 171, Antwerp, B-2020, Belgium
Wilfried Vandervorst
Affiliation:
[email protected], IMEC, AMPS, Kapeldreef 75, Leuven, B-3001, Belgium
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Abstract

The potential use of carbon nanotubes (CNT) as interconnects requires also new characterization approaches as the existing ones are optimized for three-dimensional materials and do not work for inherently one-dimensional structures like CNTs. Therefore, we have developed a so-called pick-and-place process which allows to remove an individual CNT from a specific site and to place it at another location for further analysis. The approach is based on nanomanipulation combined with scanning electron microscopy (SEM). This paper presents the pick-and-place concept and explains the different steps required for its successful application. We further demonstrate its power by characterizing individual CNTs using transmission electron microscopy (TEM) and atomic force microscopy (AFM). The developed pick-and-place approach overcomes the challenge of site-specific analysis of CNT interconnects and strongly facilitates the routine analysis of CNTs.

Keywords

scanning electron microscopy (SEM)microelectronicsnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1081: Symposium P – Carbon Nanotubes and Related Low-Dimensional Materials , 2008 , 1081-P17-04
Copyright
Copyright © Materials Research Society 2008

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