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Mathematical Modeling of Thermomechanical Stresses of Multilayer Erosion-Resistant Electrode Coatings of Magnetically Controlled MEMS

Published online by Cambridge University Press:  03 March 2015

Sergey Karabanov ,
Dmitriy Suvorov ,
Gennady Gololobov ,
Evgeny Slivkin  and
Dmitry Tarabrin
Sergey Karabanov
Affiliation:
Ryazan State Radio Engineering University, 59/1 Gagarina St., Ryazan 390005, Russia
Dmitriy Suvorov
Affiliation:
Ryazan State Radio Engineering University, 59/1 Gagarina St., Ryazan 390005, Russia
Gennady Gololobov
Affiliation:
Ryazan State Radio Engineering University, 59/1 Gagarina St., Ryazan 390005, Russia
Evgeny Slivkin
Affiliation:
Ryazan State Radio Engineering University, 59/1 Gagarina St., Ryazan 390005, Russia
Dmitry Tarabrin
Affiliation:
Ryazan State Radio Engineering University, 59/1 Gagarina St., Ryazan 390005, Russia
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Abstract

The paper presents the results of numerical modeling of thermomechanical stresses and thermal fields for conditions of erosion-resistant electrode coatings of magnetically controlled MEMS switches with W-Ti-Cu structure at local temperature and electric current influence in axially symmetrical approximation. It is shown that the introduction of titan interlayer (30-100 nm) in the coating with W-Ti-Cu structure results in considerable (more than two times) decrease of internal thermomechanical stresses between layers that increases coating resistance to delamination. It is established that there is an optimum value of Ti layer thickness at which the minimum thermomechanical stresses are provided.

Keywords

coatingsensorthin film
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1753: Symposium NN – Mathematical and Computational Aspects of Materials Science , 2015 , mrsf14-1753-nn03-01
Copyright
Copyright © Materials Research Society 2015 

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References

REFERENCES

Karabanov, S.M., Karabanov, A.S., Suvorov, D.V., Grappe, B., Coutier, C., Sibuet, H., Sazhin, B.N., Magnetically controlled MEMS switches with nanoscale contact coatings, IET Conference Publications, 2012, pp. 359 – 361 Google Scholar
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