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Electroactive Polymer Deformable Micromirrors (EAPDM) for Biomedical Optics

Published online by Cambridge University Press:  15 March 2011

Cheng Huang ,
Bo Bai ,
Baojun Chu ,
Jim Ding  and
Q.M. Zhang
Cheng Huang
Affiliation:
Electrical Engineering Department and Materials Research Institute The Pennsylvania State University, University Park, PA 16802, [email protected]
Bo Bai
Affiliation:
Electrical Engineering Department and Materials Research Institute The Pennsylvania State University, University Park, PA 16802, [email protected]
Baojun Chu
Affiliation:
Electrical Engineering Department and Materials Research Institute The Pennsylvania State University, University Park, PA 16802, [email protected]
Jim Ding
Affiliation:
Electrical Engineering Department and Materials Research Institute The Pennsylvania State University, University Park, PA 16802, [email protected]
Q.M. Zhang
Affiliation:
Electrical Engineering Department and Materials Research Institute The Pennsylvania State University, University Park, PA 16802, [email protected]
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Abstract

Electroactive polymers (EAPs) are capable of converting energy in the form of electric charge and voltage to mechanical force and movement and vice versa. Several electroactive polymer actuator materials whose responses are controlled by external electric fields, e.g. poly(vinylidene fluoride-trifluoroethylene) based fluoroterpolymers, have generated considerable interest for use in applications such as artificial muscles, sensors, parasitic energy capture, integrated bio-microelectromechanical systems (BioMEMS) and microfluidic devices due to their high electric-field induced strain, high elastic modulus, high electromechanical coupling and high frequency operation, etc. Scaling the EAP down into microsystems is one of the promising trends of EAP actuators and sensors especially for biomedical engineering. The combination of micro-optics and integrated BioMEMS, referred to as bio-micro-opto-electromechanical systems (BioMOEMS), makes a new opportunity for innovation in the EAP field. We present an approach to the fabrication of low-cost, large-stroke deformable micromirrors based on high performance electroactive polymer film microactuator arrays. Integrated Optic-BioMEMS based on electroactive polymer deformable micromirror (EAPDM) technology provide potential applications in biomedical optics such as ophthalmology (retinal imaging and vision care) and cancer detection and treatment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 820: Symposia O/R – Nanoengineered Assemblies and Advanced Micro/Nanosystems , 2004 , O8.12
Copyright
Copyright © Materials Research Society 2004

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References

1. O'Connor, Leo, MOEMS: Microtechnology with Macro Effect, SPIE's oe Magazine, 24-25, Mar. 2003.Google Scholar
2. Galletti, P.M., Rossi, D.E. De and Reggi, A.S. De (eds.), Medical Applications of Piezoelectric Polymers (Gordon & Breach, New York, 1988).Google Scholar
3. Huang, C. and Zhang, Q.M., Proc. SPIE, edited by Varadan, V.K., 5389, in press (2004), and http://www.hmc.psu.edu/artorg/electrop/Google Scholar
4. Bar-Cohen, Y. (ed.), Electroactive Polymer Actuators as Artificial Muscles, 2nded. (SPIE, Bellingham, WA, 2004).Google Scholar
5. Walker, J., Vision Correction for the 21st Century, R&D Magazine, 42-43, Jan. 2004.Google Scholar
6. Gehner, A., Wildenhain, M., Doleschal, W. and Elgner, A., Proc. SPIE 4985, MOEMS Display and Imaging Systems, edited by Smith, J.H., 4985, 180 (2003).Google Scholar
7. Xu, T.-B., Cheng, Z.-Y. and Zhang, Q.M., Appl. Phys. Lett. 80, 1082 (2002).Google Scholar
8. Xia, F., Xu, T.-B., Huang, C., Tadigadapa, S. and Zhang, Q.M., ACS Polym. Prep. 187 (2003).Google Scholar
9. Ashley, S., “Artificial Muscles,” Sci. Am. 289, 52 (2003).Google Scholar
10. Huang, C., Klein, R., Xia, F., Li, H., Zhang, Q.M., Bauer, F. and Cheng, Z.Y., IEEE Trans. Diel.& Elec. Insu. Dec. 11, 299 (2004).Google Scholar
11. Zhang, Q.M., Li, H., Poh, M., Xu, H., Cheng, Z.-Y., Xia, F. and Huang, C., Nature 419, 284 (2002).Google Scholar
12. Huang, C., Zhang, Q.M., deBotton, G. and Bhattacharya, K.. Appl. Phys. Lett. in press, (2004).Google Scholar
13. Hornbeck, L.J., TI Technical Journal, 7-46, Jul.-Sept. 1998.Google Scholar
14. Gerhard-Multhaupt, R., Prog. Colloid & Polym. Sci. 85, 133 (1991).Google Scholar
15. Furlani, E.P., “Simulation of grating light valves,” Technical Proceeding of the 1998 International Conference on Modeling and Simulation of Microsystems, Ch. 13, pp.614–618.Google Scholar
16. Tepe, R., Gerhard-Multhaupt, R., Brinker, W. and Molzow, W.-D., Applied Optics 28, 4826 (1989).Google Scholar
17. Liu, C., Shahinpoor, M. and Bar-Cohen, Y., Proc. of SPIE, edited by Bar-Cohen, Y., 3669, 69 (1999).Google Scholar
18. Sakarya, S., Vdovin, G. and Sarro, P.M., Proc. SPIE 4985, MOEMS Display and Imaging Systems, 4985, 279 (2003).Google Scholar
19. Kück, H., Doleschal, W., Gehner, A., Grunder, W., Melcher, R., Seltmann, P. and Zimmer, G., Sensors and Actuators A Physical 54, 536 (1996).Google Scholar
20. Gerhard-Multhaupt, R., Brinker, W. and Tepe, R., Prog. Colloid & Polym. Sci. 80, 63, 1989.Google Scholar
21. Wang, J.-S., Jung, I.W. and Solgaard, O., Sensors and Actuators A Physical, in press (2004).Google Scholar
22. Tepe, R., J. Opt. Soc. Am. A 4, 1273 (1987).Google Scholar
23. Gerhard-Multhaupt, R., Displays 12, 115 (1991).Google Scholar