Thin-film piezoelectric MEMS. This issue of MRS Bulletin focuses on some of the challenges microelectromechanical systems (MEMS) face as they move to smaller sizes and increased integration density, while requiring fast response and large motions. Advances in the field are being driven by and are prompting advances in heterostructure design and theoretical investigations. On the cover is a notional millimeter-scale robotic system based on PZT MEMS and highly integrated microelectronics. Green regions indicate PZT MEMS actuators, and the stacked “chips” on the body segments represent other required microelectronic subsystems. The robot is a hexapod (sixlegged)-based flight-capable design. See the technical theme that begins on page 1007.
Contents
Features
Beyond the Lab
Other
A gift of glass: web.mit.edu/glasslab
-
- Published online by Cambridge University Press:
- 12 November 2012, pp. 996-997
-
- Article
-
- You have access
- HTML
- Export citation
Books
Other
Polymer processing and characterization Advances in materials science, Volume 1 Editors: Sabu Thomas, Deepalakshmi Ponnamma, and Ajesh K. Zachariah
-
- Published online by Cambridge University Press:
- 12 November 2012, p. 1098
-
- Article
-
- You have access
- HTML
- Export citation
Posterminaries
Other
Materials research and white-knuckle air travel
-
- Published online by Cambridge University Press:
- 12 November 2012, p. 1112
-
- Article
-
- You have access
- HTML
- Export citation
Society News
Other
MRS reports election results for 2013: www.mrs.org/governance
-
- Published online by Cambridge University Press:
- 12 November 2012, p. 1089
-
- Article
-
- You have access
- HTML
- Export citation
MRS and SMM held International Materials Research Congress 2012 in Cancún: www.mrs-mexico.org.mx/imrc2012 : www.mrs.org/meeting-scene
-
- Published online by Cambridge University Press:
- 12 November 2012, pp. 1090-1091
-
- Article
-
- You have access
- HTML
- Export citation
Career Central
Other
CAREER CENTRAL
-
- Published online by Cambridge University Press:
- 12 November 2012, pp. 1099-1111
-
- Article
-
- You have access
- Export citation
Correction
Correction
Correction
-
- Published online by Cambridge University Press:
- 12 November 2012, p. 988
-
- Article
-
- You have access
- HTML
- Export citation
Front Cover (OFC, IFC) and matter
MRS volume 37 issue 11 Cover and Front matter
-
- Published online by Cambridge University Press:
- 12 November 2012, pp. f1-f8
-
- Article
-
- You have access
- Export citation
Back Cover (OBC, IBC) and matter
MRS volume 37 issue 11 Cover and Back matter
-
- Published online by Cambridge University Press:
- 12 November 2012, pp. b1-b2
-
- Article
-
- You have access
- Export citation