Self-Assembled Diblock Copolymers Applied in Semiconductor Capacitor Fabrication

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Type: Research/Researchers
Information: MRS Bulletin , Volume 26 , Issue 7: Emerging Methods for Micro- and Nano-Fabrication Nanofabrication , July 2001 , pp. 498 - 499

DOI: https://doi.org/10.1557/mrs2001.137 [Opens in a new window]

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Self-Assembled Diblock Copolymers Applied in Semiconductor Capacitor Fabrication

Volume 26, Issue 7
Claudiu Muntele
DOI: https://doi.org/10.1557/mrs2001.137

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Self-Assembled Diblock Copolymers Applied in Semiconductor Capacitor Fabrication

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