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Optimization of Ion Implantation processes for 4H-SiC DIMOSFET

Published online by Cambridge University Press:  18 May 2016

N. Piluso ,
E. Fontana ,
M.A. Di Stefano ,
G. Litrico ,
S. Privitera ,
A. Russo ,
S. Lorenti ,
S. Coffa  and
F. La Via
N. Piluso
Affiliation:
STMicroelectronics, Stradale Primosole, 50, 95100 Catania, Italy.
E. Fontana
Affiliation:
STMicroelectronics, Stradale Primosole, 50, 95100 Catania, Italy.
M.A. Di Stefano
Affiliation:
STMicroelectronics, Stradale Primosole, 50, 95100 Catania, Italy.
G. Litrico
Affiliation:
IMM-CNR, VIII Strada, 5, 95121 Catania, Italy.
S. Privitera
Affiliation:
IMM-CNR, VIII Strada, 5, 95121 Catania, Italy.
A. Russo
Affiliation:
STMicroelectronics, Stradale Primosole, 50, 95100 Catania, Italy.
S. Lorenti
Affiliation:
STMicroelectronics, Stradale Primosole, 50, 95100 Catania, Italy.
S. Coffa
Affiliation:
STMicroelectronics, Stradale Primosole, 50, 95100 Catania, Italy.
F. La Via*
Affiliation:
IMM-CNR, VIII Strada, 5, 95121 Catania, Italy.
*
*(Email: [email protected])
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Abstract

In this paper the defects generated by ion implantation in 4H-SiC DIMOSFET (Double Implanted MOSFETs), and their evolution after annealing process, have been studied in detail. The point defects generated by the source or body implantation process have been detected by micro-photoluminescence (µPL) and the effect of these defects on the electrical characteristics of the DIMOSFET has been studied. The role of the annealing process has been carefully investigated by using different temperatures. It appears fundamental for the restoring of the crystal damage. The effect of the ion implantation dose has been investigated as well. By reducing the source ion implanted dose a large decrease of point defects has been detected and a considerable improvement of the electrical characteristic of the DIMOSFET has been observed.

Keywords

ion-implantationdefectsdevices
Type
Articles
Information
MRS Advances , Volume 1 , Issue 55: Electronics and Photonics , 2016 , pp. 3673 - 3678
Copyright
Copyright © Materials Research Society 2016 

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