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Fabrication of Novel Nanoporous Films in Moisture-in-Oil Sensors via Chemical Dealloying of Cu-Cr using Combinatorial Search of Cu–Cr Alloy Compositions

Published online by Cambridge University Press:  19 February 2018

Yusuke Yoshii ,
Junpei Sakurai ,
Mizue Mizoshiri  and
Seiichi Hata
Yusuke Yoshii*
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
Junpei Sakurai
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
Mizue Mizoshiri
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
Seiichi Hata
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
*
†(Email: [email protected])
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Abstract

An as-deposited film with a Cr compositional gradient (22–15 at.% Cr) was immersed in 22.5% HNO3 for 15 hours. In the part of the film with initial Cr content in the range of 22–18 at.%, Cu dealloying resulted in sufficient Cu dealloying (final Cr content = 33–80 at.%) without film dissolution. Using the film with optimal initial composition Cu82Cr18, we successfully fabricated a nanoporous film with a pore size in the range of 20–40 nm. As a result of the formation of Cr2O3 during dealloying, this film was transparent and exhibited an insulation state. The novel nanoporous film is expected to be applied as a nanofilter in moisture-in-oil sensors.

Keywords

nanostructurethin filmcombinatorial synthesis
Type
Articles
Information
MRS Advances , Volume 3 , Issue 4: Nanomaterials , 2018 , pp. 225 - 232
Copyright
Copyright © Materials Research Society 2018 

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Footnotes

*

This article has been updated since original publication. A correction notice detailing the changes is available at doi:10.1557/adv.2018.492.

References

REFERENCES

Yoshii, Y., Fukagawa, Y., Mizoshiri, M., Sakurai, J., and Hata, S., IEEJ Transactions on Sensors and Micromachines, 137, 1, 15–22 (2017).Google Scholar
Erlebacher, J. and Sieradzki, K., Actamat-journal Scripta Materialia, 49, 991–996 (2003).Google Scholar
Lu, X., Balk, T. J., Spolenak, R., and Arzt, E., Thin Solid Films, 515, 7122–7126 (2007).Google Scholar
Li, W.-C. and Balk, T. J., Scripta Materialia, 62, 168 (2010).Google Scholar
Morrish, R., Dorame, K., and Muscat, A. J., Scripta Materialia, 64, 656 (2011).Google Scholar
Dixon, M. C., Daniel, T. A., Hieda, M., Smiligies, D. M., Chan, M. H. W., and Allara, D. L., Lnagmuir, 24, 5, 2415–2418 (2007).Google Scholar
Abburi, A. and Yeh, W. J., IEEE SENSORS JOURNAL, 12, 8, 2625–2629 (2012).Google Scholar
Matsuyama, H., Japan patent No. JP2009060777 (4 March 2010).Google Scholar