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Evaluation of AFM Probes and Instruments with Dynamic Cantilever Calibrator

Published online by Cambridge University Press:  30 January 2018

John Alexander ,
Sergey Belikov ,
Sergei Magonov  and
Mark Smith
John Alexander
Affiliation:
SPM Labs LLC, TempeAZ85283USA
Sergey Belikov
Affiliation:
SPM Labs LLC, TempeAZ85283USA
Sergei Magonov*
Affiliation:
SPM Labs LLC, TempeAZ85283USA
Mark Smith
Affiliation:
AFM Services LLC, Santa BarbaraCA93110USA
*
*(Email: [email protected])
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Abstract

The main functions of the dynamic cantilever calibrator (DCC), which are related to characterization of AFM probes and instruments, are demonstrated on a variety of probes. The resonant frequency, Q-factor and spring constant of the rectangular and V-shaped probes were evaluated by thermal tune method. The inverse optical sensitivity and optical beam deflection noise, which define performance of AFM microscopes, were extracted from DCC data. Peculiarities of thermal tune studies and the use of DCC for advanced applications are discussed.

Keywords

scanning probe microscopy (SPM)deviceseducation
Type
Articles
Information
MRS Advances , Volume 3 , Issue 11: Theory, Characterization and Modeling , 2018 , pp. 595 - 601
Copyright
Copyright © Materials Research Society 2018 

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References

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