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Measurements of striation formation time in an N2 α RF discharge

Published online by Cambridge University Press:  01 August 1997

S. M. A. DURRANI ,
P. VIDAUD  and
D. R. HALL
S. M. A. DURRANI
Affiliation:
Laser Research Laboratory, Energy Resources Division, Research Institute, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
P. VIDAUD
Affiliation:
Optoelectronics and Laser Engineering, Heriot-Watt University, Edinburgh EH14 4AS, UK
D. R. HALL
Affiliation:
Optoelectronics and Laser Engineering, Heriot-Watt University, Edinburgh EH14 4AS, UK
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Abstract

Measurements have been made of the striation formation time of an α-type RF discharge in nitrogen as a function of pressure, RF frequency, electrode separation and input power. A theoretical model is proposed that yields electron energy and density and striation formation time, given the measured discharge parameters of interelectrode voltage and separation, gas pressure and RF frequency. It is found that increasing the pressure and the electrode separation increase the striation formation time, while increasing the power and the RF frequency decrease the striation formation time. The model predicts that striations in the RF discharge are formed when the plasma charge density reaches some critical value at which the space charge distorts the interelectrode field.

Type
Research Article
Information
Journal of Plasma Physics , Volume 58 , Issue 2 , August 1997 , pp. 193 - 204
Copyright
1997 Cambridge University Press

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