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Three-dimensional visualization of nanoscale structure and deformation

Published online by Cambridge University Press:  10 September 2013

Edward J. McCumiskey ,
Nicholas G. Rudawski ,
W. Gregory Sawyer  and
Curtis R. Taylor
Edward J. McCumiskey
Affiliation:
Department of Mechanical and Aerospace Engineering, University of Florida, Gainesville, Florida 32611
Nicholas G. Rudawski
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
W. Gregory Sawyer
Affiliation:
Department of Mechanical and Aerospace Engineering, University of Florida, Gainesville, Florida 32611
Curtis R. Taylor*
Affiliation:
Department of Mechanical and Aerospace Engineering, University of Florida, Gainesville, Florida 32611
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

A straightforward approach allowing three-dimensional (3D) visualization of subsurface deformation beneath nanoindents using reconstructed cross-sectional transmission electron microscopy (TEM) data is demonstrated. This approach relies on generating an array of nanoindents, extracting a thin (<200 nm) cross section using a focused ion beam (FIB) and imaging with a transmission electron microscope. By rotating the orientation of the FIB cross section with respect to the array of nanoindents at the optimal angle, it is guaranteed that a different section of each nanoindent's subsurface plastic zone is contained within the final cross section. Subsequently, TEM images corresponding to different sections are reconstructed into a 3D image of a representative nanoindentation plastic zone. This approach can be extended to any array of nominally identical features that can be patterned with regular spacing and included in a single FIB cross section. It was also found to significantly enhance the throughput of preparing routine site-specific TEM samples, even when 3D visualization is not necessary. In this article, the approach is applied to visualize the plastic zones beneath nanoindents in GaAs (001), for loads of 50–1000 µN.

Keywords

transmission electron microscopy (TEM)nanostructurenanoindentation
Type
Articles
Information
Journal of Materials Research , Volume 28 , Issue 18 , 28 September 2013 , pp. 2637 - 2643
Copyright
Copyright © Materials Research Society 2013 

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References

REFERENCES

Kramer, D., Huang, H., Kriese, M., Robach, J., Nelson, J., Wright, A., Bahr, D., and Gerberich, W.: Yield strength predictions from the plastic zone around nanocontacts. Acta Mater. 47, 333–343 (1998).CrossRefGoogle Scholar
Lebourhis, E. and Patriarche, G.: Transmission electron microscopy observations of low-load indents in GaAs. Philos. Mag. Lett. 79, 805–812 (1999).CrossRefGoogle Scholar
Lucca, D., Herrmann, K., and Klopfstein, M.: Nanoindentation: Measuring methods and applications. CIRP Ann. - Manuf. Technol. 59, 803–819 (2010).CrossRefGoogle Scholar
Lloyd, S.J., Castellero, A., Giuliani, F., Long, Y., McLaughlin, K.K., Molina-Aldareguia, J.M., Stelmashenko, N.A., Vandeperre, L.J., and Clegg, W.J.: Observations of nanoindents via cross-sectional transmission electron microscopy: A survey of deformation mechanisms. Proc. R. Soc., Ser. A 461, 2521–2543 (2005).CrossRefGoogle Scholar
Jang, D., Li, X., Gao, H., and Greer, J.R.: Deformation mechanisms in nanotwinned metal nanopillars. Nat. Nanotechnol. 7, 594–601 (2012).CrossRefGoogle ScholarPubMed
Langford, R.M. and Petford-Long, A.K.: Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling. J. Vac. Sci. Technol., A 19, 2186 (2001).CrossRefGoogle Scholar
Lomness, J.K., Giannuzzi, L.A., and Hampton, M.D.: Site-specific transmission electron microscope characterization of micrometer-sized particles using the focused ion beam lift-out technique. Microsc. Microanal. 7, 418–423 (2001).CrossRefGoogle ScholarPubMed
Mayer, J., Giannuzzi, L.A., Kamino, T., and Michael, J.: TEM sample preparation and FIB-induced damage. MRS Bull. 32, 400–407 (2007).CrossRefGoogle Scholar
Van Tendeloo, G., Bals, S., Van Aert, S., Verbeeck, J., and Van Dyck, D.: Advanced electron microscopy for advanced materials. Adv. Mater. 24, 5655–5675 (2012).CrossRefGoogle ScholarPubMed
Holzer, L., Indutnyi, F., Gasser, P.H., Münch, B., and Wegmann, M.: Three-dimensional analysis of porous BaTiO3 ceramics using FIB nanotomography. J. Microsc. 216, 84–95 (2004).CrossRefGoogle ScholarPubMed
Grandfield, K., Palmquist, A., and Engqvist, H.: High-resolution three-dimensional probes of biomaterials and their interfaces. Philos. Trans. R. Soc. London, Ser. A 370, 1337–1351 (2012).Google ScholarPubMed
Tomiyasu, B., Fukuju, I., Komatsubara, H., Owari, M., and Nihei, Y.: High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS). Nucl. Instrum. Methods Phys. Res., Sect. B 136–138, 1028–1033 (1998).CrossRefGoogle Scholar
Lučić, V., Förster, F., and Baumeister, W.: Structural studies by electron tomography: From cells to molecules. Annu. Rev. Biochem. 74, 833–865 (2005).CrossRefGoogle ScholarPubMed
Koster, A.J., Ziese, U., Verkleij, A.J., Janssen, A.H., and de Jong, K.P.: Three-dimensional transmission electron microscopy: A novel imaging and characterization technique with nanometer scale resolution for materials science. J. Phys. Chem. B 104, 9368–9370 (2000).CrossRefGoogle Scholar
Bals, S., Van Tendeloo, G., and Kisielowski, C.: A new approach for electron tomography: Annular dark-field transmission electron microscopy. Adv. Mater. 18, 892–895 (2006).CrossRefGoogle Scholar
Schneider, C.A., Rasband, W.S., and Eliceiri, K.W.: NIH image to imageJ: 25 years of image analysis. Nat. Methods 9, 671–675 (2012).CrossRefGoogle ScholarPubMed
Ge, D., Minor, A., Stach, E., and Morris, J.: Size effects in the nanoindentation of silicon at ambient temperature. Philos. Mag. 86, 4069–4080 (2006).CrossRefGoogle Scholar
Ge, D., Domnich, V., Juliano, T., Stach, E., and Gogotsi, Y.: Structural damage in boron carbide under contact loading. Acta Mater. 52, 3921–3927 (2004).CrossRefGoogle Scholar
Oliver, D.J., Bradby, J.E., Williams, J.S., Swain, M.V., and Munroe, P.P.: Thickness-dependent phase transformation in nanoindented germanium thin films. Nanotechnology 19, 475709 (2008).CrossRefGoogle ScholarPubMed
Lawn, B.: Fracture and deformation in brittle solids: A perspective on the issue of scale. J. Mater. Res. 19, 22–29 (2004).CrossRefGoogle Scholar