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Diamond nucleation from the gas phase: A kinetic approach

Published online by Cambridge University Press:  31 January 2011

E. Molinari ,
R. Polini ,
V. Sessa ,
M.L. Terranova  and
M. Tomellini
E. Molinari
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, via della Ricerca Scientifica, 1-00133 Roma, Italy
R. Polini
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, via della Ricerca Scientifica, 1-00133 Roma, Italy
V. Sessa
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, via della Ricerca Scientifica, 1-00133 Roma, Italy
M.L. Terranova
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, via della Ricerca Scientifica, 1-00133 Roma, Italy
M. Tomellini
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, via della Ricerca Scientifica, 1-00133 Roma, Italy
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Abstract

Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 4 , April 1993 , pp. 785 - 797
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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