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Damage accumulation in diamond during ion implantation

Published online by Cambridge University Press:  12 February 2015

Roman A. Khmelnitsky ,
Valeriy A. Dravin ,
Alexey A. Tal ,
Evgeniy V. Zavedeev ,
Andrey A. Khomich ,
Alexander V. Khomich ,
Alexander A. Alekseev  and
Sergey A. Terentiev
Roman A. Khmelnitsky*
Affiliation:
Tal Division of Solid State Physics, Lebedev Physical Institute of RAS, Moscow 119991, Russia
Valeriy A. Dravin
Affiliation:
Tal Division of Solid State Physics, Lebedev Physical Institute of RAS, Moscow 119991, Russia
Alexey A. Tal
Affiliation:
Tal Division of Solid State Physics, Lebedev Physical Institute of RAS, Moscow 119991, Russia
Evgeniy V. Zavedeev
Affiliation:
Natural Sciences Center, Prokhorov General Physics Institute of RAS, Moscow 119991, Russia; and National Research Nuclear University MEPhI, Moscow 115409, Russia
Andrey A. Khomich
Affiliation:
Natural Sciences Center, Prokhorov General Physics Institute of RAS, Moscow 119991, Russia; and Kotelnikov Institute of Radioengineering and Electronics of RAS, Moscow Region, Fryazino 141120, Russia
Alexander V. Khomich
Affiliation:
Kotelnikov Institute of Radioengineering and Electronics of RAS, Moscow Region, Fryazino 141120, Russia
Alexander A. Alekseev
Affiliation:
Technological Institute for Superhard and Novel Carbon Materials, Moscow Region, Troitsk 142190, Russia
Sergey A. Terentiev
Affiliation:
Technological Institute for Superhard and Novel Carbon Materials, Moscow Region, Troitsk 142190, Russia
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Single-crystalline diamond plates were implanted by He+ ions with a set of energies and fluences that ensure uniform radiation damage (RD) in a 670-nm-thick layer. Implantation is carried out at a wide range of fluences, which allows one to cover the range of RD levels from very low to complete graphitization of diamond. Using the measurement data on the bending of diamond plates and the surface swelling of the ion-implanted material, we calculate the mechanical stress and the density of diamond for various levels of RD. Diamonds with various levels of RD are investigated by the Raman scattering and optical transmission methods. We establish that, above the graphitization threshold, the diamond phase almost completely disappears as the RD level increases, while the fraction of sp2 material sharply increases. Such a material is unexpectedly ductile. It cannot be restored to diamond even by annealing under a pressure corresponding to thermodynamic stability of diamond.

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Articles
Information
Journal of Materials Research , Volume 30 , Issue 9: Focus Issue: Characterization and Modeling of Radiation Damage on Materials: State of the Art, Challenges, and Protocols , 14 May 2015 , pp. 1583 - 1592
Copyright
Copyright © Materials Research Society 2015 

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Footnotes

Contributing Editor: William J. Weber

References

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