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Compositional and microstructural evolution during annealing of Terfenol-D nanoparticulate films

Published online by Cambridge University Press:  24 August 2011

James Ma ,
Michael F. Becker ,
John W. Keto  and
Desiderio Kovar
James Ma
Affiliation:
Materials Science and Engineering Program, University of Texas at Austin, Austin, Texas 78731
Michael F. Becker
Affiliation:
Materials Science and Engineering Program, University of Texas at Austin, Austin, Texas 78731; and Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, Texas 78731
John W. Keto
Affiliation:
Materials Science and Engineering Program, University of Texas at Austin, Austin, Texas 78731; and Department of Physics, University of Texas at Austin, Austin, Texas 78731
Desiderio Kovar*
Affiliation:
Materials Science and Engineering Program, University of Texas at Austin, Austin, Texas 78731; and Department of Mechanical Engineering, University of Texas at Austin, Austin, Texas 78731
*
b)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Although highly magnetostrictive thin films of Terfenol-D have been produced by a variety of methods, high-quality thick films have proved to be far more challenging to produce. To date, thick film processes have resulted in nanoparticulate films that contain significant porosity that reduces stiffness and results in oxidation and poor magnetostrictive performance. With the goal of understanding microstructural and compositional factors that affect performance, nanoparticulate Terfenol-D thick films were produced by laser ablation of microparticle aerosols combined with supersonic impaction. X-ray diffraction, scanning electron microscopy, transmission electron microscopy, x-ray photon spectroscopy, and magnetic measurements were performed on nanoparticles and on films as-deposited and after annealing in vacuum or in a reducing atmosphere. These measurements show that segregation occurs during oxidation of the films, prior to annealing, and results in films with poor magnetostriction. The segregation persists during annealing with no visible changes to the morphology or density of the nanoparticulate films exposed to temperatures as high as 800 °C. These results suggest that oxidation and segregation must be avoided to produce highly magnetostrictive thick films.

Keywords

Magnetic propertiesFilmAnnealing
Type
Articles
Information
Journal of Materials Research , Volume 26 , Issue 20 , 28 October 2011 , pp. 2672 - 2681
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1.Quandt, E., Gerlach, B., and Seemann, K.: Preparation and applications of magnetostrictive thin films. J. Appl. Phys. 76, 7000 (2004).CrossRefGoogle Scholar
2.Wada, M., Uchida, H-H., Matsumura, Y., Uchida, H., and Kaneko, H.: Preparation of Films of (Tb, Dy)Fe2 Giant magnetostrictive alloy by ion beam sputtering process and their characterization. Thin Solid Films. 281-282, 503 (1996).CrossRefGoogle Scholar
3.Ma, J., O’Brien, D.T., and Kovar, D.: Amorphous Terfenol-D films using nanosecond pulsed laser deposition. Thin Solid Films. 5187, 319 (2009).CrossRefGoogle Scholar
4.Ma, J., Becker, M.F., Keto, J.W., and Kovar, D.: Laser ablation of nanoparticles and nanoparticulate, thick Fe1.92Tb0.3Dy0.7 films. J. Mater. Res. 25, 1733 (2010).CrossRefGoogle Scholar
5.Grabham, N.J., White, N.M., and Beeby, S.P.: Thick-film magnetostrictive material for MEMS. Electron. Lett. 36, 332 (2000).CrossRefGoogle Scholar
6.van Dover, R.B., Gyorgy, E.M., Frankenthal, R.P., Hong, M., and Siconolfi, D.J.: Effect of oxidation on the magnetic properties of unprotected TbFe thin films. J. Appl. Phys. 59, 1291 (1986).CrossRefGoogle Scholar
7.Wada, M., Uchida, H.H., and Uchida, H.: Effects of the compositional change and the contamination on the magnetic and magnetostrictive characteristics of TbxDy1-xFe2 (x = 0–1) films. J. Alloy. Comp. 258, 174 (1997).CrossRefGoogle Scholar
8.MacKenzie, J.K.: The elastic constants of a solid containing spherical holes. Proc. Phys. Soc. London B63, 2 (1950).CrossRefGoogle Scholar
9.du Tremolet de Lacheisserie, E. and Peuzin, J.C.: Magnetostriction and internal stresses in thin films: The cantilever method revisited. J. Magn. Magn. Mater. 136, 189 (1994).CrossRefGoogle Scholar
10.Henneke, D.E.: Laser Ablation of a Terfenol-D (Tb0.3Dy0.7Fe1.92) Microparticle Aerosol and Subsequent Supersonic Nanoparticle Impaction for Magnetostrictive Thick Films. Ph.D. Dissertation, University of Texas at Austin, Austin, TX, 2001.Google Scholar
11.Huang, C., Nichols, W.T., O’Brien, D.T., Becker, M.F., Keto, J.W., and Kovar, D.: Supersonic jet deposition of silver nanoparticle aerosols: Correlations of impact conditions and film morphologies. J. Appl. Phys. 101, 064902 (2007).CrossRefGoogle Scholar
12.De La Mora, J.F., Hering, S.V., Rao, N., and McMurry, P.H.: Hypersonic impaction of ultrafine particles. J. Aerosp. Sci. 21, 169 (1990).CrossRefGoogle Scholar
13.O’Brien, D.T., Ph.D. Dissertation, University of Texas at Austin, Austin, TX, 2006.Google Scholar
14.Nichols, W.T., Malyavanatham, G., Henneke, D.E., O’Brien, D.T., Becker, M.F., and Keto, J.W.: Bimodal nanoparticle size distributions produced by laser ablation of microparticles in aerosols. J. Nanopart. Res. 4, 423 (2002).CrossRefGoogle Scholar
15.Nichols, W.T., Malyavanatham, G., Henneke, D.E., Brock, J.R., Becker, M.F., Keto, J.W., and Glicksman, H.D.: Gas and pressure dependence for the mean size of nanoparticles produced by laser ablation of flowing aerosols. J. Nanopart. Res. 2, 141 (2000).CrossRefGoogle Scholar
16.Bhargava, G., Gouzman, I., Chun, C.M., Ramanarayanan, T.A., and Bernasek, S.L.: Characterization of the “native” surface thin film on pure polycrystalline iron: A high resolution XPS and TEM study. Appl. Surf. Sci. 253, 4322 (2007).CrossRefGoogle Scholar
17.Padalia, B.D., Lang, W.C., Norris, P.R., Watson, L.M., and Fabian, D.J.: X-ray photoelectron core-level studies of the rare-earth metals and their oxides. Proc. R. Soc. London, A Math. Phys. Sci. 354, 269 (1977).Google Scholar
18.Sarma, D.D. and Rao, C.N.R.: XPES studies of oxides of second- and third-row transition metals including rare earths. J. Electron Spectrosc. Relat. Phenom. 20, 25 (1980).CrossRefGoogle Scholar
19.Albert, A.D., Becker, M.F., Keto, J.W., and Kovar, D.: Low temperature, pressure-assisted sintering of nanoparticulate silver films. Acta Mater. 56, 1820 (2008).CrossRefGoogle Scholar
20.Mei, W., Umeda, T., Zhou, S., and Wang, R.: Preparation and magnetostriction of Tb–Dy–Fe sintered compacts. J. Magn. Magn. Mater. 174, 100 (1997).CrossRefGoogle Scholar
21.Ried, K., Schnell, M., Schatz, F., Hirscher, M., Ludescher, B., Sigle, W., and Kronmueller, H.: Crystallization behaviour and magnetic properties of magnetostrictive TbDyFe Films. Phys. Status Solidi A 167, 195 (1998).3.0.CO;2-C>CrossRefGoogle Scholar
22.Wada, M., Uchida, H., and Kaneko, H.: Effect of annealing treatment of the Tb0.3Dy0.7Fe2 thin films on the magnetic and magnetostrictive characteristics. J. Alloy. Comp. 258, 169 (1997).CrossRefGoogle Scholar
23.Clark, A.E. and Belson, H.S.: Giant room-temperature magnetostrictions in TbFe2 and DyFe2. Phys. Rev. B 5, 3642 (1972).CrossRefGoogle Scholar
24.Herzer, G.: Anisotropies in soft magnetic nanocrystalline alloys. J. Magn. Magn. Mater. 294, 99 (2005).CrossRefGoogle Scholar
25.Cushing, B.L., Golub, V.O., Henry, M., Oliva, B.L., Cook, E., Holmes, C.W., and O’Connor, C.J.: Effects of annealing on the magnetic properties, size and strain of gold-coated permalloy nanoparticles. Nanotechnology 16, 1701 (2005).CrossRefGoogle Scholar
26.Green, D.G.: An introduction to the mechanical properties of ceramics (Cambridge Univ. Press, Cambridge, England, 1998).CrossRefGoogle Scholar
27.http://www.etrema-usa.com/documents/Terfenol.pdf, accessed Feb. 16, 2010.Google Scholar
28.Rahaman, M.N.: Ceramic Processing and Sintering (Marcel Dekker, New York, NY, 2003).Google Scholar