Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-27T11:15:14.681Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl4–NH3–BCl3–H2–Ar system

Published online by Cambridge University Press:  15 August 2017

Jianping Li ,
Laifei Cheng ,
Fang Ye ,
Yongsheng Liu ,
Yan Zhu  and
Litong Zhang
Jianping Li
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Laifei Cheng*
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Fang Ye
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Yongsheng Liu
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Yan Zhu
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Litong Zhang
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
*
a) Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

The codeposition characteristics of Si–B–N ceramics from the SiCl4–NH3–BCl3–H2–Ar system at lower temperatures and phase transformation of as-prepared Si–B–N ceramics at temperatures from 1200 to 1800 °C were investigated. Thermodynamic analysis results indicated that the BN + Si3N4 dual phase region existed from 800 to 1200 °C and that 800 °C was an optimum deposition temperature to deposit Si–B–N ceramic coating. Deposition efficiencies at equilibrium for Si3N4 and BN were high, particularly at temperatures below 1000 °C. Pressure and dilution ratio of H2 had little influence on deposition efficiencies of BN and Si3N4 at 800 °C. The amorphous Si–B–N ceramic coatings were successfully deposited at 800 °C from the same precursor system and contained N–B and N–Si bonds by XPS analysis. It kept amorphous below 1600 °C in N2 and partly transformed to α/β-Si3N4 when heat treated at 1600 °C in N2 for 2 h. These results demonstrated that the composite Si–B–N ceramics could be fabricated at 800 °C and used below 1600 °C.

Keywords

ceramicchemical vapor depositionphase transformation
Type
Articles
Information
Journal of Materials Research , Volume 32 , Issue 20 , 27 October 2017 , pp. 3801 - 3810
Check for updates
Copyright
Copyright © Materials Research Society 2017 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

Contributing Editor: Yanchun Zhou

References

REFERENCES

Lu, A.J.: SiBN ceramics, a stealth material at high temperature. Acta Phys. Sin. 62, 217101 (2013).Google Scholar
Liao, N.B., Xue, W., and Zhang, M.: Molecular dynamics investigation of Si–B–N ceramics: Effects of boron content. Modell. Simul. Mater. Sci. Eng. 20, 035009 (2012).Google Scholar
Baldus, H.P., Passing, G., and Eiling, A.: Amorphous fibres containing Si, B, and N, a process for the production thereof and the use thereof, and composites containing these fibres and the production thereof. U.S. Patent No. 5,985,430, 1999.Google Scholar
Peng, Y., Mou, S., Han, K., Yu, M., and Li, A.: Thermal stability and wave permeability of high performance SiBN(C) ceramic fibers. Acta Mater. Compositae Sin. 33, 358 (2016).Google Scholar
Peng, Y.Q., Han, K.Q., Zhao, X., and Yu, M.H.: Large-scale preparation of SiBN ceramic fibres from a single source precursor. Ceram. Int. 40, 4797 (2014).Google Scholar
Li, D., Zhang, C., Li, B., Cao, F., Wang, S., and Li, J.: Mechanical properties of unidirectional SiBN fiber reinforced boron nitride matrix composites. Mater. Lett. 68, 222 (2012).Google Scholar
Zhao, X., Han, K., Peng, Y., Yuan, J., Li, S., and Yu, M.: A novel precursor route for the production of Si–B–N ceramic fibers. Mater. Lett. 65, 2717 (2011).Google Scholar
Tang, Y., Wang, J., Li, X., Xie, Z., Wang, H., Li, W., and Wang, X.: Polymer-derived SiBN fiber for high-temperature structural/functional applications. Chem.–Eur. J. 16, 6458 (2010).CrossRefGoogle ScholarPubMed
Maeda, M. and Makino, T.: Low dielectric-constant amorphous sibn ternary films prepared by plasma-enhanced deposition. Jpn. J. Appl. Phys., Part 1 26, 660 (1987).Google Scholar
Neureither, B., Basa, C., Sandwick, T., and Blumenstock, K.: Boron nitride and silicon boron nitride film and polish characterization. J. Electrochem. Soc. 140, 3607 (1993).Google Scholar
Essafti, A., Gómez-Aleixandre, C., Fierro, J.L.G., Fernández, M., and Albella, J.M.: Chemical vapor deposition synthesis and characterization of co-deposited silicon–nitrogen–boron materials. J. Mater. Res. 11, 2565 (1996).Google Scholar
Hua, M., Xiang, Y., Junfeng, Y., and Chengbiao, W.: Effect of dc negative-bias and silicon introduction on performance of Si–B–N composite film by RF-PECD technique. Appl. Surf. Sci. 245, 45 (2005).Google Scholar
Masahiko, M.: Effect of oxygen doping into SiBN ternary film. Jpn. J. Appl. Phys. 29, 1789 (1990).Google Scholar
Essafti, A., Gómez-Aleixandre, C., and Albella, J.M.: Preparation of SiNB films by CVD techniques: Effect of SiH4 addition to B2H6 and NH3 gas mixtures. Diamond Relat. Mater. 5, 580 (1996).Google Scholar
Stöckel, S., Marx, G., and Goedel, W.A.: Coating of ceramic SiC, SiBNC, and Al2O3 fibers with SiBN using a continuous CVD process—Influence of stoichiometry on stability against oxidation and hydrolysis. Chem. Vap. Deposition 13, 553 (2007).Google Scholar
Liu, Y., Chai, N., Li, Z., Ye, F., Liu, X., and Cheng, L.: Effect of deposition temperature on deposition kinetics and mechanism of silicon boron nitride coating deposited from SiCl4–BCl3–NH3–H2–Ar mixture using low pressure chemical vapor deposition. Surf. Coat. Technol. 261, 295 (2015).Google Scholar
Moore, A.W., Sayir, H., Fanner, S.C., and Morscher, G.N.: Improved interface coatings for SiC fibers in ceramic composites. Presented at the Proceedings of the 19th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures—A: Ceramic Engineering and Science Proceedings, John Wiley & Sons, Inc., Hoboken, NJ, 2008; p. 409.Google Scholar
Liu, Y.S., Chai, N., Qin, L., Li, Z., Ye, F., and Cheng, L.F.: Tensile fracture behavior and strength distribution of SiCf/SiC composites with different SiBN interface thicknesses. Ceram. Int. 41, 1609 (2015).Google Scholar
Li, Z., Cheng, L., Liu, Y., and Ye, F.: Thermodynamic analysis of chemical vapor deposition of BCl3–NH3–SiCl4–H2–Ar system. J. Wuhan Univ. Technol., Mater. Sci. Ed. 30, 951 (2015).Google Scholar
Li, Z.: Process and structure of SiBN interphase manufactured by CVD/CVI. Master thesis, Northwestern Polytechnical University, Xi’an, P.R. China, 2014.Google Scholar
Li, B., Zhang, C.R., Cao, F., Wang, S.Q., Li, J.S., and Chen, B.: Effects of curing atmosphere pressure on properties of silica fibre reinforced silicon–boron nitride matrix composites derived from precursor infiltration and pyrolysis. Mater. Technol. 22, 81 (2007).Google Scholar
Li, B., Zhang, C-R., Cao, F., Wang, S-Q., Chen, B., and Li, J-S.: Effects of fiber surface treatments on mechanical properties of T700 carbon fiber reinforced BN–Si3N4 composites. Mater. Sci. Eng., A 471, 169 (2007).Google Scholar
Jiang, Y.G., Zhang, C.R., Cao, F., Wang, S.Q., Hu, H.F., and Cao, Y.B.: Effects of thermal load on mechanical properties and microstructures of 3D SiO2f /Si3N4–BN composites using polyborosilazane. Mater. Sci. Eng., A 487, 597 (2008).Google Scholar
Jiang, Y.G., Zhang, C.R., Cao, F., Wang, S.Q., Hu, H.F., and Qi, G.J.: Fabrication of high performance 2.5D SiO2f /Si3N4–BN composites for high-temperature application. Adv. Eng. Mater. 9, 114 (2007).Google Scholar
Jin, S.Y., Guo, K.K., Qi, H.M., Zhu, Y.P., and Wang, F.: High yield polyborosilazane precursor for SiBN ceramics. Adv. Mater. Res. 1004–1005, 409 (2014).Google Scholar
Peng, Y.Q., Han, K.Q., Zhao, X., Wang, Z.H., Deng, Z.H., Liu, Z.Q., Zhang, J., Li, X.D., Sun, Z.Y., and Yu, M.H.: Preparing continuous SiBN ceramic fiber from precursor polymer of N-methylpolyborosilazanes. Presented at the 18th International Conference on Composites Materials, ICCM 2011, International Committee on Composite Materials, Vancouver, Canada, 2011.Google Scholar
Baldus, H-P. and Passing, G.: Studies on SiBN(C)-ceramics: Oxidation- and crystallization behavior lead the way to applications. MRS Online Proc. Libr. 346, 617 (1994).CrossRefGoogle Scholar
Heinemann, D., Assenmacher, W., Mader, W., Kroschel, M., and Jansen, M.: Structural characterization of amorphous ceramics in the system Si–B–N–(C) by means of transmission electron microscopy methods. J. Mater. Res. 14, 3746 (1999).Google Scholar
Naslain, R.: Design, preparation and properties of non-oxide CMCs for application in engines and nuclear reactors: An overview. Compos. Sci. Technol. 64, 155 (2004).Google Scholar
Liu, X.F., Zhang, L.T., Liu, Y.S., Ye, F., and Yin, X.W.: Microstructure and the dielectric properties of SiCN–Si3N4 ceramics fabricated via LPCVD/CVI. Ceram. Int. 40, 5097 (2014).Google Scholar
Liu, X., Zhang, L., Liu, Y., Ye, F., and Yin, X.: Thermodynamic calculations on the chemical vapor deposition of Si–C–N from the SiCl4–NH3–C3H6–H2–Ar system. Ceram. Int. 39, 3971 (2013).Google Scholar
Zuo, X., Zhang, L., Liu, Y., Li, S., and Cheng, L.: Effect of deposition temperature on dynamics and mechanism of deposition for Si–B–C ceramic from BCl3/SiCH3Cl3/H2 precursor. J. Mater. Sci. Technol. 28, 793 (2012).Google Scholar
Hirai, T., Goto, T., and Sakai, T.: Preparation of amorphous Si3N4–BN composites by chemical vapor deposition. In Emergent Process Methods for High-Technology Ceramics, Davis, R., Palmour, H. III, and Porter, R., eds. (Springer US, New York, 1984); p. 347.Google Scholar
Besmann, T.M.: Thermodynamic analysis of the chemical vapor deposition of composite 〈Si3N4〉–〈BN〉 coatings. J. Am. Ceram. Soc. 69, 69 (1986).Google Scholar
Meloni, G., Viswanathan, R., and Gingerich, K.A.: Experimental and theoretical investigations of the structure and the stability of the BNSi molecule. J. Chem. Phys. 111, 9325 (1999).Google Scholar
Pattanaik, A. and Sarin, V.: Basic principles of CVD thermodynamics and kinetics. Chem. Vap. Deposition 2, 23 (2001).Google Scholar
Ingo, G.M., Zacchetti, N., Dellasala, D., and Coluzza, C.: X-ray photoelectron-spectroscopy investigation on the chemical-structure of amorphous-silicon nitride (a-Sinx). J. Vac. Sci. Technol., A 7, 3048 (1989).Google Scholar
Xue, J., Yin, X., Ye, F., Zhang, L., Cheng, L., and Bessman, T.: Thermodynamic analysis on the codeposition of SiC–Si3N4 composite ceramics by chemical vapor deposition using SiCl4–NH3–CH4–H2–Ar mixture gases. J. Am. Ceram. Soc. 96, 979 (2013).Google Scholar
Liu, Y., Liu, X., Ye, F., Zhang, L., Cheng, L., and Yin, X.: Thermodynamic calculations and kinetic verifications on the chemical vapor deposition process of Si–C–N ceramic from the SiCl3CH3–NH3–H2–Ar precursors. Ceram. Int. 40, 15831 (2014).CrossRefGoogle Scholar
Senemaud, C., Drisskhodja, M., Gheorghiu, A., Harel, S., Dufour, G., and Roulet, H.: Electronic-structure of silicon–nitride studied by both soft-X-ray spectroscopy and photoelectron-spectroscopy. J. Appl. Phys. 74, 5042 (1993).Google Scholar
Polo, M.C., Martínez, E., Esteve, J., and Andújar, J.L.: Preparation of B–C–N thin films by r.f. plasma assisted CVD. Diamond Relat. Mater. 7, 376 (1998).Google Scholar
Shulga, Y.M. and Loryan, V.E.: Irs, X-ray photoelectron-spectroscopy and X-ray phase-analysis of the structure of composite formed during boron powders and silicon dioxide mixture combustion in gaseous nitrogen (self-distributing high-temperature synthesis mode). Zh. Neorg. Khim. 39, 1096 (1994).Google Scholar
Gouin, X., Grange, P., Bois, L., Lharidon, P., and Laurent, Y.: Characterization of the nitridation process of boric-acid. J. Alloys Compd. 224, 22 (1995).CrossRefGoogle Scholar
Brainard, W.A. and Wheeler, D.R.: An XPS study of the adherence of refractory carbide silicide and boride rf-sputtered wear-resistant coatings. J. Vac. Sci. Technol. 15, 1800 (1978).Google Scholar
Burke, A., Brown, C., Bowling, W., Glaub, J., Kapsch, D., Love, C., Whitaker, R., and Moddeman, W.: Ignition mechanism of the titanium–boron pyrotechnic mixture. Surf. Interface Anal. 11, 353 (1988).Google Scholar
Park, J.J., Komura, O., and Yamakawa, A.: Change of crystal phases and microstructure of amorphous Si–C–N powder by hot pressing. J. Am. Ceram. Soc. 81, 2253 (1998).Google Scholar
Guifang, H.: Fundamental manufacturing techniques by CVI route for continuous fiber reinforced silicon nitride matrix composites. Ph.D. thesis, Northwestern Polytechnical University, Xi’an, P.R. China, 2008.Google Scholar
Cai, Y., Zimmermann, A., Prinz, S., and Aldinger, F.: Crystallization behavior of polymer-derived Si–B–C–N ceramics in a high-pressure nitrogen environment. J. Mater. Res. 17, 2765 (2002).Google Scholar
Cheng, Y., Yin, X.W., Liu, Y.S., Li, S.W., Cheng, L.F., and Zhang, L.T.: BN coatings prepared by low pressure chemical vapor deposition using boron trichloride–ammonia–hydrogen–argon mixture gases. Surf. Coat. Technol. 204, 2797 (2010).Google Scholar
Friess, M., Bill, J., Golczewski, J., Zimmermann, A., Aldinger, F., Riedel, R., and Raj, R.: Crystallization of polymer-derived silicon carbonitride at 1873 K under nitrogen overpressure. J. Am. Ceram. Soc. 85, 2587 (2002).Google Scholar