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Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

Published online by Cambridge University Press:  27 May 2015

Lan Zhou ,
Santosh K. Suram ,
Natalie Becerra-Stasiewicz ,
Slobodan Mitrovic ,
Kevin Kan ,
Ryan J.R. Jones  and
John M. Gregoire Open the ORCID record for John M. Gregoire [Opens in a new window]
Lan Zhou
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
Santosh K. Suram
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
Natalie Becerra-Stasiewicz
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
Slobodan Mitrovic
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
Kevin Kan
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
Ryan J.R. Jones
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
John M. Gregoire*
Affiliation:
Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Recent efforts have demonstrated enhanced tailoring of material functionality with mixed anion materials, yet exploratory research with mixed anion chemistries is limited by the sensitivity of these materials to synthesis conditions. Synthesis of a particular metal oxynitride compound by traditional reactive annealing requires specific, limited ranges of both oxygen and nitrogen chemical potentials to establish equilibrium between the solid-state material and a reactive atmosphere. Using Ta–O–N as an example system, we describe a combination of reactive sputter deposition and rapid thermal processing (RTP) for synthesis of mixed anion inorganic materials. Heuristic optimization of reactive gas pressures to attain a desired anion stoichiometry is discussed, and the ability of RTP to enable amorphous to crystalline transitions without preferential anion loss is demonstrated through the controlled synthesis of nitride, oxide, and oxynitride phases.

Keywords

oxynitridessputteringrapid thermal processingmixed anion synthesis
Type
Articles
Information
Journal of Materials Research , Volume 30 , Issue 19: Focus Issue: Nitrides and Oxynitride Materials , 14 October 2015 , pp. 2928 - 2933
Copyright
Copyright © Materials Research Society 2015 

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References

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