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Flexible SIW humidity sensors based on nanodiamond sensing films

Published online by Cambridge University Press:  21 April 2023

Chang-ming Chen Open the ORCID record for Chang-ming Chen [Opens in a new window] ,
Lu Chen ,
Yao Yao  and
Ye Peng
Chang-ming Chen*
Affiliation:
College of Communication Engineering, Chengdu University of Information Technology, Chengdu 610225, China
Lu Chen
Affiliation:
Engineering Practice Center, Chengdu Aeronautic Polytechnic, Chengdu 610100, China
Yao Yao
Affiliation:
School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Ye Peng
Affiliation:
College of Communication Engineering, Chengdu University of Information Technology, Chengdu 610225, China
*
Corresponding author: Chang-ming Chen, E-mail: [email protected]
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Abstract

In this paper, flexible substrate integrated waveguide (SIW) resonators have been designed and fabricated on polyimide substrates for humidity sensing applications. The proposed SIW resonant cavity allows the resonator to obtain the maximum humidity sensitivity and meet the demand for flexible microwave sensing detection. Meanwhile, the humidity response performance can be further significantly enhanced by introducing nanodiamond (ND) sensing material. Three prototypes of ND-coated SIW sensors with different bending radii are measured to analyze their humidity sensing performance. The experimental results demonstrate that the proposed ND-coated SIW sensor with the minimum bending radius can achieve a maximum humidity sensitivity of 1.09 MHz/% relative humidity (RH) in the high RH region (>75.3% RH) and a low humidity hysteresis of 1.8% in the range of 11.3–97.3% RH. This study provides a promising candidate to realize flexible microwave sensors with excellent sensing performance.

Keywords

Flexiblehumidity sensorsnanodiamondSIW
Type
RFID and Sensors
Information
International Journal of Microwave and Wireless Technologies , Volume 15 , Issue 9 , November 2023 , pp. 1475 - 1482
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Copyright
Copyright © The Author(s), 2023. Published by Cambridge University Press in association with the European Microwave Association

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