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Process development for the reproducible roughness measurementof optical surfaces using white light interferometry

Published online by Cambridge University Press:  22 September 2014

Johannes Liebl ,
Heiko Biskup ,
Sebastian Draxinger ,
Rolf Rascher  and
Christine Wünsche
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Abstract

Today a wide range of instruments are available for the rapid roughness quantification ofoptical surfaces but especially for three dimensional measurement methods no standardizedprocess is established. This leads to different results, even if the same specimen istested with similar measurement devices. In order to solve this problem an exemplaryprocess development is described in this paper. To do this firstly the term of roughnessis defined as a surface deviation and then the functionality and importance of filters inroughness measurement as well as the used measurement devices are described. The followingchapter defines the used materials and methods which were used during the measurementprocess. In the last part of this paper the results are discussed and a process assignmentis suggested.

Keywords

Reproducibleroughnessmeasurementwhite light interferometrysurfacemetrologyopticprocess assignment
Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 5 , Issue 1 , 2014 , 104
Copyright
© EDP Sciences 2014

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References

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