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Imaging XPS. A Contribution to 3D X-ray Analysis

Published online by Cambridge University Press:  06 March 2019

M. F. Ebel ,
H. Ebel ,
M. Mantler  and
R. Svagera
M. F. Ebel
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien Wiedner Hauptstraβe 8-10, A 1040 Wien ( Austria)
H. Ebel
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien Wiedner Hauptstraβe 8-10, A 1040 Wien ( Austria)
M. Mantler
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien Wiedner Hauptstraβe 8-10, A 1040 Wien ( Austria)
R. Svagera
Affiliation:
Institut für Angewandte und Technische Physik Technische Universität Wien Wiedner Hauptstraβe 8-10, A 1040 Wien ( Austria)
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Extract

X-ray photoelectron spectrometry (XPS) has been a well established surface analytical technique for approximately 20 years. Fhotoelectrons are ejected by characteristic x-radiation. In our investigations we use Alκα-radiation. The depth from which l-l/e of the measured signal comes, is restricted to a few nanometers by inelastic mean free paths of photoelectrons in solids.

Type
V. XRF Instrumentation and Techniques
Information
Advances in X-Ray Analysis , Volume 34: Thirty-Ninth Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1990 , 1990 , pp. 201 - 211
Copyright
Copyright © International Centre for Diffraction Data 1990

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